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  • Vacuum Isolation Valves

Vacuum Isolation Valves

VAT vacuum isolation valve solutions. Overview of the various pneumatic and electrical actuated valve series and technologies.

01.0 1 × 10-10 mbar to 2 bar (abs)

Mini UHV Gate Valve

The General Purpose Isolation Valve for Demanding Applications

01.2 1 × 10-7 mbar to 1 bar (abs)

Mini Gate Valve

The General Purpose Isolation Valve

08.1 1 × 10-7 mbar to 1.6 bar (abs)

FV Insertable Gate Valve

Where Installation Space is Limited (DN 63 - 100)

08.2 1 × 10-7 mbar to 1.6 bar (abs)

FV Insertable Gate Valve

Where Installation Space is Limited (DN 50)

09.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Wedge Design

For Isolation Applications with High By-Product Content in the Gas Stream

10.8 1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The Standard for UHV Isolation

11.1 1 × 10-8 mbar to 1.6 bar (abs)

HV Gate Valve

The Standard for High Vacuum Isolation

12.1 1 × 10-7 mbar to 1.6 bar (abs)

FV Gate Valve

The Standard for Vacuum Isolation

14.0

HV Gate Valve

For Standard High Cycle Vacuum Isolation

15.0 1 × 10-7 mbar to 1 bar (abs)

Isolation Gate Valve

Exceptionally Low Shock and Particle Count

15.1 1 × 10-8 mbar to 1 bar (abs)

HV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

15.2 1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

16.2 1 × 10-8 mbar to 1.2 bar (abs)

HV Pendulum Isolation Valve

The Standard for Isolation Requirements in Evaporator and Sputter Applications

16.8 1 × 10-8 mbar to 1.2 bar (abs)

Large HV Pendulum Isolation Valve

Compact Design for Large Vacuum Flows and Harsh Conditions

17.2 1 × 10-8 mbar to 2 bar (abs)

HV Gate Valve with Protective Ring

Reliable Under Harsh Conditions

19.0 1 × 10-7 mbar to 1 bar (abs)

Large FV Gate Valve

The Standard Where Large Diameters Are Required

19.1 1 × 10-8 mbar to 1 bar (abs)

Large HV Gate Valves

The Standard Where Large Diameters Are Required

20.3 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes

19.2 1 × 10-10 mbar to 1 bar (abs)

Large UHV Gate Valve

The Standard Where Large Diameters Are Required

20.4 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes (Extended Body Version)

21.0 1 × 10-8 mbar to 1.3 bar (abs)

FV Butterfly Valve

Reliable Vacuum Isolation in a Compact Design

24.4 1 × 10-7 mbar to 5 bar (abs)

FV Angle Valve

Uncompromised Reliability for Large Volume Flows

24.5 1 × 10-7 mbar to 5 bar (abs)

FV Inline Valve

Uncompromised Reliability for Large Volume Flows

25.0 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Angle Version)

Maximum Conductance for Harsh Process Environments

25.1 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Inline Version)

Maximum Conductance for Harsh Process Environments

25.2 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (3/2 Way Version)

Maximum Conductance for Harsh Process Environments

25.7 Vacuum to 1.2 bar (abs)

HV Quick Shut-Off Valve

Perfect Backflow Protection

26.4 DN 10– 40

HV Angle Valve

For pumping and venting of HV systems.

26.5 DN 10– 40

HV Inline Valve

Uncompromised Reliability

28.4 5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly Low Outgassing Performance

29.0 1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses (DN 25 - 80)

29.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses

29.2 1 × 10-7 mbar to 2 bar (abs)

HV Angle Valve with Soft-Pump Function

Avoids Turbulence or Condensation, Large Conductance Spectrum (DN 100 - 160)

47.1 XHV to 2 bar (abs)

XHV RF All-Metal Gate Valve

Reliable Sector Isolation for Storage Rings or Microwave Transmission Lines (DN 200)

47.2 XHV to 2 bar (abs)

XHV RF All-Metal Gate Valve

Reliable Sector Isolation for Storage Rings or Microwave Transmission Lines (DN 40 - 160)

48.1 XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For High Temperature (DN 16, 40, 200, 250, 320)

54.1 XHV to 2 bar (abs)

UHV All-Metal Angle Valve - Easy Close

For Extreme UHV Requirements

48.2 XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For High Temperature (DN 63, 100, 160)

57.0 XHV to 5 bar (abs)

XHV All-Metal Angle Valve

For Extreme Temperature and Radiation Requirements (DN 63 - 160)

57.1 XHV to 5 bar (abs)

XHV All-Metal Angle valve

For Extreme Temperature and Radiation Requirements (DN 10 - 40)

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Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
  • Vacuum Pendulum Valves
  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
More about Vacuum Valves
  • Vacuum Valve Technologies
  • Case Studies
Selected Applications
  • Selected Applications
  • Semiconductor Production
  • Solar Panel Production
  • Display Production
  • Lighting Production (LED, OLED)
  • Sub-Fab Systems
  • Research
  • Scientific Instruments
  • Thin Film Coating
  • Industry
  • Medical & Pharmaceutical Applications
  • Your Application
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  • Fixed Price Refurbishment
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