01.0 1 × 10-10 mbar to 2 bar (abs)

Mini UHV Gate Valve

The General Purpose Isolation Valve for Demanding Applications

01.2 1 × 10-7 mbar to 1 bar (abs)

Mini Gate Valve

The General Purpose Isolation Valve

08.1 1 × 10-7 mbar to 1.6 bar (abs)

FV Insertable Gate Valve

Where Installation Space is Limited (DN 63 - 100)

08.2 1 × 10-7 mbar to 1.6 bar (abs)

FV Insertable Gate Valve

Where Installation Space is Limited (DN 50)

09.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Wedge Design

The flexible Solution for Isolation of Gas-Streams with High By-Product Content

09.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Protection Ring

The Save Solution for Isolation of Gas-Streams with Very High By-Product Content

09.2 1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Wedge Design

The Standard for Isolation of Gas-Streams with High By-Product Content

10.8 1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The Standard for UHV Isolation

11.1 1 × 10-8 mbar to 1.6 bar (abs)

HV Gate Valve

The Standard for High Vacuum Isolation

12.1 1 × 10-7 mbar to 1.6 bar (abs)

FV Gate Valve

The Standard for Vacuum Isolation

14.0

HV Gate Valve

For Standard High Cycle Vacuum Isolation

15.0 1 × 10-7 mbar to 1 bar (abs)

Isolation Gate Valve

Exceptionally Low Shock and Particle Count

15.1 1 × 10-8 mbar to 1 bar (abs)

HV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

15.2 1 × 10-10 mbar to 1 bar (abs)

UHV Isolation Gate Valve

Exceptionally Low Shock and Particle Count

17.2 1 × 10-8 mbar to 2 bar (abs)

HV Gate Valve with Protective Ring

Reliable Under Harsh Conditions

19.0 1 × 10-7 mbar to 1 bar (abs)

Large FV Gate Valve

The Standard Where Large Diameters Are Required

19.1 1 × 10-8 mbar to 1 bar (abs)

Large HV Gate Valves

The Standard Where Large Diameters Are Required

19.2 1 × 10-10 mbar to 1 bar (abs)

Large UHV Gate Valve

The Standard Where Large Diameters Are Required

47.1 XHV to 2 bar (abs)

XHV RF All-Metal Gate Valve

Reliable Sector Isolation for Storage Rings or Microwave Transmission Lines (DN 200)

47.2 XHV to 2 bar (abs)

XHV RF All-Metal Gate Valve

Reliable Sector Isolation for Storage Rings or Microwave Transmission Lines (DN 40 - 160)

48.1 XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For High Temperatures (DN 16, 40, 200, 250, 320)

48.2 XHV to 2 bar (abs)

XHV All-Metal Gate Valve

For High Temperature (DN 63, 100, 160)

64.2 DN 100 - 400

HV Control Gate Valve

For High Cycle Vacuum Control and Isolation

64.8 1 × 10-10 mbar to 1.6 bar (abs)

UHV Control Gate Valve

For Standard Vacuum Control and Isolation

FAQ Vacuum Gate Valves

What is a vacuum gate valve?
A vacuum gate valve is a type of mechanical device used in vacuum systems to control the flow of gases in and out of a vacuum chamber. It consists of a sliding gate or plate that can be moved to either block or allow passage through a vacuum valve body, effectively sealing off the chamber from the external environment. It thus belongs to the class of vacuum isolation valves. However, there are also variants that can be used to control the gas flow.
What are the key features of vacuum gate valves?
Vacuum gate valves are designed with a few distinct characteristics. They have a robust construction, often using materials like stainless steel or aluminum for their resistance to vacuum conditions. The sealing mechanism ensures a high level of vacuum integrity when closed, preventing leaks and maintaining the vacuum pressure within the chamber. These vacuum valves can be actuated manually, pneumatically, or electronically, allowing for versatile control based on the specific application.
How do vacuum gate valves operate?
Vacuum gate valves operate by using a sliding gate mechanism to control the passage of gases. When the vacuum valve is open, the gate is moved out of the flow path, allowing gases to pass through with a high conductance. Closing the vacuum valve involves moving the gate across the flow path to create a seal. This sealing mechanism is crucial to maintaining the vacuum conditions within the chamber. To avoid particle generation in particle sensitive applications the sliding gate mechanism is designed to avoid friction at the valve housing.
What are the applications of vacuum gate valves?
Vacuum gate valves find applications in various industries, including semiconductor manufacturing, research and development, analytical instrumentation, and vacuum coating. They are essential for isolating different vacuum chambers, controlling gas flows during processes, and facilitating maintenance or repairs without compromising the vacuum environment.
What considerations are important when using vacuum gate valves?
When using vacuum gate valves, factors like compatibility with process gases, operating pressure range, cycle speed, and maintenance requirements should be considered. Proper installation, regular maintenance, and adherence to manufacturer guidelines are essential for optimal performance and longevity of these valves. Additionally, selecting the appropriate size and type of vacuum gate valve for the specific vacuum system and process is crucial to ensure efficient operation and reliable vacuum integrity.