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  • 3 Position Vacuum Valves

3 Position Vacuum Valves

Function between isolation and control valve. In addition to the open and closed positions, these valves have a third, defined adjustable position of the valve gate. This gate position, which is often designed as "optically-closed", also enables a "standby" function or smoother opening with reduced conductance, for example, to avoid pressure peaks.

10.8 1 × 10-10 mbar to 1.2 bar (abs)

UHV Gate Valve

The Standard for UHV Isolation

11.1 1 × 10-8 mbar to 1.6 bar (abs)

HV Gate Valve

The Standard for High Vacuum Isolation

14.0

HV Gate Valve

For Standard High Cycle Vacuum Isolation

16.2 1 × 10-8 mbar to 1.2 bar (abs)

HV Pendulum Isolation Valve

The Standard for Isolation Requirements in Evaporator and Sputter Applications

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Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
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  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
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