Can be used both as a control valve and as an isolation valve, as well as a combination of both functions. Feature: Precise control over large conductance ranges.
Reliable Isolation in Contaminating and Aggressive Vacuum Processes
Reliable Isolation in Contaminating and Aggressive Vacuum Processes (Extended Body Version)
Reliable Vacuum Isolation in a Compact Design
Fast, Precise Downstream Pressure Control
Fast, Precise Downstream Pressure Control and Isolation
Outstanding Controllability with Exceptionally Low Conductance
Compact High Performance
