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  • Vacuum Butterfly Valves

Vacuum Butterfly Valves

Can be used both as a control valve and as an isolation valve, as well as a combination of both functions. Feature: Precise control over large conductance ranges.

20.3 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes

20.4 1 × 10-8 mbar to 2 bar (abs)

VATTERFLY Valve

Reliable Isolation in Contaminating and Aggressive Vacuum Processes (Extended Body Version)

21.0 1 × 10-8 mbar to 1.3 bar (abs)

FV Butterfly Valve

Reliable Vacuum Isolation in a Compact Design

61.3 1 × 10-8 mbar to 1.2 bar (abs)

Butterfly Control Valve

Fast, Precise Downstream Pressure Control

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Fast, Precise Downstream Pressure Control and Isolation

95.3 DN 25 –DN 50

HV Control and Isolation Valve Combo Unit

Compact High Performance

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Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
  • Vacuum Pendulum Valves
  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
More about Vacuum Valves
  • Vacuum Valve Technologies
  • Case Studies
Selected Applications
  • Selected Applications
  • Semiconductor Production
  • Solar Panel Production
  • Display Production
  • Lighting Production (LED, OLED)
  • Sub-Fab Systems
  • Research
  • Scientific Instruments
  • Thin Film Coating
  • Industry
  • Medical & Pharmaceutical Applications
  • Your Application
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  • Standard Repair Service
  • Fixed Price Refurbishment
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