Precision & Sensibility

Precision is not only critical in controlling vacuum-assisted production processes, but also in substrate or wafer handling itself. Reliability and precision in the movement of, for example, silicon wafers in semiconductor manufacturing is crucial for production quality and throughput efficiency. For years, VAT has also offered its customers the integration of motion components, such as substrate or wafer handling systems, as part of the production of vacuum modules. With its VAT high-performance vacuum motion components, VAT now also makes these components available to interested customers independently of our integrated solutions.

As one of the first product groups in the field of high-performance vacuum motion components VAT is offering mechatronic wafer lift and substrate lift systems.

All VAT high performance vacuum motion components are tailor-made for the specific application requirements. Benefit from our extensive experience, with thousands of VAT motion component modules in use worldwide.

Contact us if you would like to learn more about.