The volume manufacturing of multilayer stacks with dry etching processes requires optimal sealing technology (with self-cleaning function) and an overall robust tool design for high uptime. VAT vacuum valve solutions provide innovative functionality to ensure increased process safety and enhanced tool uptime.
To find out more about how a VAT vacuum valve solution can help to address dry etching process issues, please select from the products listed below.
Large Transfer Valve / Insert with TWINVAT
High Performance for Display Production Systems - Atmospheric Pressure Version
Large Transfer Door Insert with L-VAT
Exceptional Performance for Display and PV Production Systems
16.81 × 10-8 mbar to 1.2 bar (abs)
Large HV Pendulum Isolation Valve
Compact Design for Large Vacuum Flows and Harsh Conditions
29.21 × 10-7 mbar to 2 bar (abs)
HV Angle Valve with Soft-Pump Function
Avoids Turbulence or Condensation, Large Conductance Spectrum (DN 100 - 160)