VAT Vacuum Valves VAT Edge Welded Bellows VAT Motion Components VAT Flange Connections & Seals VAT Vacuum Modules
{{ region }} English Deutsch 日本語 中文
  • About VAT
  • Careers
  • Downloads
  • Investor Relations
  • Supplier
  • Contact
VAT Vacuum Valves VAT Edge Welded Bellows VAT Motion Components VAT Flange Connections & Seals VAT Vacuum Modules
  • News
  • Vacuum Valves
    • Vaccum Valves Overview
    Categories
    • Vacuum Control Valves
    • Vacuum Isolation Valves
    • Vacuum Gate Valves
    • Vacuum Angle / Inline / Cylinder Valves
    • Vacuum Butterfly Valves
    • Vacuum Pendulum Valves
    • Pressure Relief / Venting Valves
    • Gas Dosing / Leak Valves
    • 3 Position Vacuum Valves
    • Vacuum Check Valves
    • Fast Closing / Beam Stopper Valves
    • Vacuum All-Metal Valves
    • Vacuum Transfer Valves
    • Vacuum Transfer Doors
    • Vacuum Multi-Valve Units
    More about vacuum valves
    • Vacuum Valve Technologies
    • ITER Valve Catalog
    • Case Studies
    • News
    Vacuum Valve Technologies
  • Selected Applications
    • Selected Applications
    Discover selected applications
    • Semiconductor Production
      • Process Control & Isolation
      • Substrate Transfer
      • Sub-Fab Systems
    • Solar Panel Production
      • Solar Thin Film Deposition
      • Sub-Fab Systems
    • Display Production
      • Display Dry Etching
      • Sputtering
      • Thin-film Encapsulation (CVD)
      • OLED Evaporation
      • Ion Implanting
      • CVD
      • OLED Inkjet Printing
      • Sub-fab Systems
    • Lighting Production (LED, OLED)
      • Lighting Thin Film Deposition
      • Sub-Fab Systems
      • Lighting Etching
    • Sub-Fab Systems
    • Research
      • Space Simulation
      • High Energy Physics
    • Scientific Instruments
      • Mass Spectrometry & Gas Analysis
      • Electron Microscopy, Metrology, Inspection & Defect Review
    • Thin Film Coating
    • Industry
      • Vacuum Furnaces
      • Vacuum Transportation
      • Battery Production
      • Crystal Growth
      • Vacuum Drying
    • Medical & Pharmaceutical Applications
      • Proton Therapy
      • Positron Emission Tomography (PET)
      • Vacuum Sterilization
      • Pharmaceutical Freeze Drying
    • Your Application
    Your Application
  • Product Services
    • Upgrades & Retrofits
    • Spare parts
    • Standard Repair Service
    • Fixed Price Refurbishment
    • VAT Service Centers
{{ region }} English Deutsch 日本語 中文
  • Home
  • Applications
  • Display Production
  • Display Dry Etching

Display Dry Etching

Typically, dry etching removes and etches a masked pattern of semiconductor material through an ion bombardment (usually a plasma of reactive gases) to dislodge material from the exposed surfaces. This process can result in condensation and high levels of by-products, which may affect vacuum valve functionality and reliability.

The volume manufacturing of multilayer stacks with dry etching processes requires optimal sealing technology (with self-cleaning function) and an overall robust tool design for high uptime. VAT vacuum valve solutions provide innovative functionality to ensure increased process safety and enhanced tool uptime.

To find out more about how a VAT vacuum valve solution can help to address dry etching process issues, please select from the products listed below.

Relevant Series

Large Transfer Valve / Insert with TWINVAT

06.1

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems

Large Transfer Valve / Insert with TWINVAT

06.3

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems - Atmospheric Pressure Version

Large Transfer Door Insert with L-VAT

07.7

Large Transfer Door Insert with L-VAT

Exceptional Performance for Display and PV Production Systems

Large HV Pendulum Isolation Valve

16.8

1 × 10-8 mbar to 1.2 bar (abs)

Large HV Pendulum Isolation Valve

Compact Design for Large Vacuum Flows and Harsh Conditions

HV Angle Valve

26.4

1 × 10-8 mbar to 2 bar (abs)

HV Angle Valve

Uncompromised Flexibility and Reliability

HV Inline Valve

26.5

1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised Reliability

HV Angle Valve with Soft-Pump Function

29.2

1 × 10-7 mbar to 2 bar (abs)

HV Angle Valve with Soft-Pump Function

Avoids Turbulence or Condensation, Large Conductance Spectrum (DN 100 - 160)

HV Pendulum Control Valve

65.3

1 × 10-8 mbar to 1 bar (abs)

HV Pendulum Control Valve

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

Related Products

Edge Welded Metal Bellows

Related Products

Flange Connections and Seals

{{ region }} English Deutsch 日本語 中文
Scroll to Top
Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
  • Vacuum Pendulum Valves
  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
More about Vacuum Valves
  • Vacuum Valve Technologies
  • Case Studies
Selected Applications
  • Selected Applications
  • Semiconductor Production
  • Solar Panel Production
  • Display Production
  • Lighting Production (LED, OLED)
  • Sub-Fab Systems
  • Research
  • Scientific Instruments
  • Thin Film Coating
  • Industry
  • Medical & Pharmaceutical Applications
  • Your Application
Product Services
  • Upgrades & Retrofits
  • Spare Parts
  • Standard Repair Service
  • Fixed Price Refurbishment
Company
  • About VAT
  • Investors Relations
  • Careers
  • News
  • Contact
Customer Service
  • Downloads

© 2022 VAT Group AG | Switzerland

  • Imprint
  • Privacy Policy
  • Terms & Conditions
  • Supplier login
This browser is no longer supported even by Microsoft. To prevent security issues, we recommend to use modern browsers like Chrome, Firefox or Edge.