Core function: control of volume flows. The control range of the min. and max. conductance as well as the precision and reliability of the control and control mechanics are decisive.
Fast, Precise Downstream Pressure Control
Fast, Precise Downstream Pressure Control and Isolation
The High Pressure and High Temperature Solution
For High Cycle Vacuum Control and Isolation
For Standard Vacuum Control and Isolation
Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems
Ideal for Corrosive Etching Applications With High Process Pressure and Low Volume Flows
Flow Optimized Pressure Control
Compact High Performance