Butterfly Control Valve
Fast, Precise Downstream Pressure Control
HV Butterfly Control and Isolation Valve
Fast, Precise Downstream Pressure Control and Isolation
HV Angle Control Valve
The High Pressure and High Temperature Solution
UHV Control Gate Valve
For Standard Vacuum Control and Isolation
HV Pendulum Control Valve
Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems
HV Pendulum Control Valve
Ideal for Corrosive Etching Applications With High Process Pressure and Low Volume Flows
FAQ Vacuum Control Valves
Vacuum control valves are available in very different designs, as control requirements for vacuum systems can vary greatly. The following criteria are therefore decisive when selecting a vacuum control valve:
1) The level of the maximum differential pressure at which the valve is to control. This is not necessarily the maximum differential pressure that the valve can withstand when closed, if it also has an isolation function.
2) The size of the required conductance spectrum, the control range.
3) The size of the flow rate
4) The speed with which changes in the volume flow are to be carried out
5) The resistance to by-products in the volume flow or to aggressive media in general.
6) The sensitivity to flow changes e.g. turbulence caused by the control process.
7) The sensitivity to particles that may be emitted through the valve.
8) The ambient temperatures at which the valve is to be used and at which it is to control.
9) The type of controllability as linear flow change or dynamic change, where the control speed can be controlled independently of the position of the valve plate in a so-called control profile.
Butterfly control valves allow outstandingly precise and fast pressure control under all conditions. The plate acts as a throttling element and varies the conductance of the valve opening. The pressure controller integrated in the butterfly valve calculates the required plate position, optimizing the achievement of the desired pressure.
HV Butterfly Control and Isolation Valves
HV butterfly control and isolation valves allow outstanding pressure control under all conditions. The plate acts as a throttling element and varies the conductance of the valve opening. The pressure controller integrated in the valve calculates the required plate position, optimizing the achievement of the desired pressure.
The additional isolation function of the valve avoids the characteristically higher seal wear of butterfly valves. An off-center plate shaft and the special geometry of the valve body and seal seat minimize seal friction while increasing seal performance.
HV Angle Control Valve
HV angle control valves are designed for scenarios with particularly high pressure and high temperatures, such as ALD or CVD. In doing so, HV angle control valves deliver exceptionally precise pressure control performance even at maximum operating temperatures.
HV Control Gate Valves
HV gate control valves are recommended for high cycle vacuum control and isolation in standard vacuum processes such as sputtering and etching processes in semiconductor production. HV control gate valves meet standard requirements for durability, modularity and ease of maintenance and also impress with high availability and low operating costs.
UHV Control Gate Valves
UHV control gate valves guarantee precise control and isolation in ultra-high vacuum processes, such as "sputtering" or EUV in semiconductor production. UHV control gate valves meet the standard requirements for durability, modularity and ease of maintenance and also impress with high availability and low operating costs.
HV Pendulum Control Valves
HV pendulum control valves offer optimized downstream pressure control and vacuum isolation especially for semiconductor and display production. The HV pendulum control valve offers a wide control range over a broad conductance spectrum.
Flow-Symmetrical Control Valves
Flow-symmetrical control valves ensure maximum quality and productivity with flow-optimized pressure control and can also be used as downstream control and isolation valves.
HV Control and Isolation Valve Combination System
HV control and isolation valve combination systems combine the best features of a control and an isolation valve. The effective combination of the two valve technologies thus enables a high-performance combination system in a compact design.
VAT vacuum control valves have outstanding properties for particle prevention, as the contact-free movement of the closing plate and optimally damped opening and closing movements eliminate the shocks and vibrations common with conventional valves. With various locking technologies, VAT vacuum control valves also guarantee that the vacuum is maintained safely even if the compressed air or power supply fails.