61.3 1 × 10-8 mbar to 1.2 bar (abs)

Butterfly Control Valve

Fast, Precise Downstream Pressure Control

61.6 1 × 10-8 mbar to 1.2 bar (abs)

HV Butterfly Control and Isolation Valve

Fast, Precise Downstream Pressure Control and Isolation

62.0 1 × 10-8 mbar to 1.4 bar (abs)

HV Angle Control Valve

The High Pressure and High Temperature Solution

64.2 DN 63 – 200

HV Control Gate Valve

For High Cycle Vacuum Control and Isolation

64.8 DN 160

UHV Control Gate Valve

For Standard Vacuum Control and Isolation

65.3 1 × 10-8 mbar to 1 bar (abs)

HV Pendulum Control Valve

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

65.5 1 × 10-6 mbar to 1.2 bar (abs)

HV Pendulum Control Valve

Ideal for Corrosive Etching Applications With High Process Pressure and Low Volume Flows

67.0 1 × 10-6 mbar to 1.2 bar (abs)

Symmetrical Control Valve

Flow Optimized Pressure Control

95.3 DN 25 –DN 50

HV Control and Isolation Valve Combo Unit

Compact High Performance