Outstanding Pressure Control Under All Conditions

The 61.3 Control Butterfly Valve provides outstanding pressure control performance. With its fast and precise acting motion controller (0.1 s) it’s the perfect solution for fine control in CVD and ALD processes. The plate acts as a throttling element and varies the conductance of the valve opening. The integrated pressure controller of the 61.3 calculates the required plate position to achieve the set pressure as fast as possible.

It is especially designed for harsh downstream processes with particle in the gas stream. The 61.3 stays fully operational despite high particle loads and debris accumulation by design.

Already installed in thousands of demanding applications under various process conditions, the 61.3 series has proven its outstanding reliability. With a robust design and direct mounting option, as well as reduced and easy maintenance, the 61.3 series convinces in all aspects.

Various design options in body material, surface treatment, elastomers, flange connections, special sizes as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) simplify the integration into various vacuum applications.

61.3 Control Butterfly Valves is available in aluminum or stainless steel, with standard flange connectors in ISO-KF and ISO-F. Customer-specific flanges can be integrated as well as special features like an integrated heater with insulation. Various FFKM/FKM elastomers are available on request (FKM Viton® is standard).

Key features of the 61.3 Control Butterfly Valve


  • Excellent pressure control
  • Very fast operation
  • On-board software for local operation
  • Reliable operation in harsh process conditions


  • Better process controllability
  • High uptime / unrestricted performance
  • Low cost of operations
Technical data
Sizes   DN 25 (1’’) DN 40 (1½’’), DN 50 (2’’),
DN 63 (2½"), DN 80 (3"), DN 100 (4"),
DN 160 (6"), DN 200 (8"), DN 250 (10"),
DN 320 (12")
Actuator   Integrated controller with Stepper Motor
  Open/Close < 0.1 s (depending on DN and plate material)
Body Material   Aluminum or Stainless Steel
Standard Flanges   ISO-KF, ISO-F
Leak Rate Valve Body Aluminium < 1 × 10-9 mbar ls-1
  Stainless Steel < 1 × 10-9 mbar ls-1
Pressure Range   1 × 10-8 mbar to 1.2 bar (abs)
Cycles until first Service1) Pressure Controll 2 Million
Temperature Valve Body ≤ 150 °C
Material Valve Body, Plate EN AW-6082 (3.2315) or AISI 316L (1.4404 or 1.4435)
  Shaft AISI 316L (1.4404 or 1.4435)
Seal Feedthrough FKM (e.g. Viton®)
Mounting Position   Shaft on Pump side recommended
    DN 25 ...                 DN 320
Max. differential pressure On the plate 1000 mbar ...                 75 mbar
Conductance Molecular flow 22 ls-1 ...                 27000 ls-1
Miniumum controllable conductance Molecular flow 0.15 ls-1 ...                 6 ls-1
Typical closing or opening time
"position only" version
Aluminium, Stainless steel 0.09 s ...                 0.29 s
Weight Aluminium valve
Stainless steel valve
2.0 kg (4.40 lbs)
2.5 kg (5.5 lbs)
...                 10.4 kg (23 lbs)
12.3 (27.1 lbs)



1) Maximum values depending on operating conditions and sealing materials.

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