Outstanding Pressure Control Under All Conditions

The 61.3 Control Butterfly Valve provides outstanding pressure control performance. With its fast and precise acting motion controller (0.1 s) it’s the perfect solution for fine control in CVD and ALD processes. The plate acts as a throttling element and varies the conductance of the valve opening. The integrated pressure controller of the 61.3 calculates the required plate position to achieve the set pressure as fast as possible.

It is especially designed for harsh downstream processes with particle in the gas stream. The 61.3 stays fully operational despite high particle loads and debris accumulation by design.

Already installed in thousands of demanding applications under various process conditions, the 61.3 series has proven its outstanding reliability. With a robust design and direct mounting option, as well as reduced and easy maintenance, the 61.3 series convinces in all aspects.

Various design options in body material, surface treatment, elastomers, flange connections, special sizes as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) simplify the integration into various vacuum applications.

61.3 Control Butterfly Valves is available in aluminum or stainless steel, with standard flange connectors in ISO-KF and ISO-F. Customer-specific flanges can be integrated as well as special features like an integrated heater with insulation. Various FFKM/FKM elastomers are available on request (FKM is standard).

Key features of the 61.3 Control Butterfly Valve


  • Excellent pressure control
  • Very fast operation
  • On-board software for local operation
  • Reliable operation in harsh process conditions


  • Better process controllability
  • High uptime / unrestricted performance
  • Low cost of operations
  • Technical data
  • Downloads
Sizes     DN 25 (1’’) DN 40 (1½’’), DN 50 (2’’),
DN 63 (2½"), DN 80 (3"), DN 100 (4"),
DN 160 (6"), DN 200 (8"), DN 250 (10"),
DN 320 (12")
Actuator     Integrated controller with Stepper Motor
Body Material     Aluminum or Stainless Steel
Standard Flanges     ISO-KF, ISO-F
Leak Rate Valve Body Aluminium   < 1 × 10-9 mbar ls-1
  Stainless Steel   < 1 × 10-9 mbar ls-1
Pressure Range     1 × 10-8 mbar to 1.2 bar (abs)
Cycles until first Service1) Pressure Controll   2 Million
Temperature Valve Body   ≤ 150 °C
Material Valve Body, Plate Aluminium
Stainless steel
EN AW-6082 (3.2315)
AISI 316L (1.4404 or 1.4435)
  Shaft   AISI 316L (1.4404 or 1.4435)
Seal Feedthrough   FKM (others on request)
Feedthrough     Rotating shaft, direct driven
Mounting Position     Any (shaft on pump side recommended)
      DN 25 ...                 DN 320
Max. differential pressure On the plate   1000 mbar ...                 75 mbar
Conductance Molecular flow   22 ls-1 ...                 27000 ls-1
Miniumum controllable conductance Molecular flow   0.15 ls-1 ...                 6 ls-1
Typical closing or opening time
"position only" version
Aluminium, Stainless steel   0.09 s ...                 0.29 s
Weight Aluminium valve
Stainless steel valve
  2.0 kg (4.40 lbs)
2.5 kg (5.5 lbs)
...                 10.4 kg (23 lbs)
12.3 (27.1 lbs)



1) Maximum values depending on operating conditions and sealing materials.

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