VAT vacuum and gas dosing valves for CVD processes offer not only very precise control and but also high resistance in contact with aggressive media. This increases production quality and availability, and thus overall profitability.
To learn more about how a VAT vacuum valve solution can help solve thin film encapsulation challenges, please select from the products listed below.
Large Transfer Valve / Insert with TWINVAT
High Performance for Display Production Systems - Atmospheric Pressure Version
Large Transfer Door Insert with L-VAT
Exceptional Performance for Display and PV Production Systems
61.31 × 10-8 mbar to 1.2 bar (abs)
Butterfly Control Valve
Fast, Precise Downstream Pressure Control