Reliable Under All Conditions

The 06.3 Large Transfer Valve / Insert with TWINVAT was developed for the special requirements of display production systems with a high cycle rate. Based on the concept of the 06.1 series, it combines, like the 06.1, an outstandingly fast opening and closing movement (≤ 2 s at 150 mm opening height) with high resistance to process-related deposits that would limit the performance of standard valves. Equipped with larger pressure elements, the 06.3 can withstand full differential pressure on the gate in opening direction. It is thus particularly suitable for OLED, PVD and load-lock applications.

The 06.3 is available in the "Ultra Clean" configuration for OLED and with a high-speed option for PVD and load-lock applications.

The 06.3 is designed for high uptime and reliable operation over a service life of at least one million cycles.

The TWINVAT technology used for the 06.3 is based on a modular platform concept. It provides a shock-free opening and closing motion. The smooth-running, double-acting TWINVAT mechanism ensures uniform seal pressure over the entire seal surface, minimizing seal wear and potential particle release. This also reduces to a relevant extent the total cost of FFKM seals over the life of the valve.

The 06.3 series is available as standard transfer valve with housing or as insert version to be mounted directly into the process chamber.


Closed
Optically closed
Open

The 06.3 Large Transfer Valve / Insert with TWINVAT is tailored to the exact customer specification like all VAT transfer valve solutions. These customizations can include an additional process control unit, special surface treatments like hard anodized or nickel-plated aluminum, other sealing materials, vacuum gauges to detect the pressure in the valve body, bellows protected shaft feedthrough, RF & DC grounding options for valve and gate, lateral mounting position of the actuators and more.


Key features of the 06.3 Large Transfer Valve / Insert with TWINVAT

Features:

  • Shock-free gate movement
  • Special valve service function for gate seal changes
  • Uniform pressure on the gate seal

Benefits:

  • Low particle
  • Low down time for maintenance
  • Fast cycle times
  • High uptime
Technical data
Sizes   100 x 1000 mm to 300 x 3800 mm (3.94" x 39.37" to 11.81" x 149.60")
Actuator Pneumatic Double acting with position indicator
Body Material   Aluminum
Feedthrough   Shaft Feedthrough
Leak Rate Valve Body < 1 × 10-7 mbar ls-1
  Valve Seat < 1 × 10-7 mbar ls-1
Differential Pressure On the Gate Valve: in closing direction only ≤ 1 bar
    Insert: in opening direction ≤ 30 mbar
  At Opening ≤ 5 mbar
Cycles until first Service   1 Million
Closing or opening time   < 2.5 s (with 150 mm opening height)
Temperature Valve Body, Gate ≤ 120 °C
  Actuator ≤ 60 °C
  Solenoid Valve ≤ 50 °C
Material Valve Body, Gate EN AW-6082 (3.2315) or EN AW-5083 (3.3547)
  Actuator Shafts AISI 316 (1.4401)
  Bellows on pressure element AISI 633 (AM 350)
Seal Gate, flanges, feedthrough, actuator FKM (Viton®)
Pump / Vent Port   ISO-KF 40
Mounting Position   Actuator Up or Down
Position Indicator Voltage 24 V DC PNP (NPN optional)

 

Customized Solution

Specify your customized solution.

If you have your specification already at hand, please upload it and submit it to us. We are happy to send you a quote.