The global display industry is driven by ever larger glass substrate dimensions, the shift from LCD to OLED technology, more complex display manufacturing processes, and the optimization of existing production facilities. These dynamics demand high-performance vacuum valve solutions that contribute to quality and productivity improvements.
Reliability, safety and availability are therefore the decisive success criteria here for vacuum valves used in sub-fab processes. Based on the experience of thousands of vacuum valve installations in sub-fab processes worldwide, the comprehensive and proven VAT vacuum valve portfolio addresses all sub-fab requirements.
To find out more about how a VAT vacuum valve solution can help to address sub-fab system issues, please select from the products listed below.