For optimal isolation and control of vacuum conditions in ion implanters, vacuum valves are needed that allow precise control while exhibiting physically neutral behavior in the process.
To find out more about how a VAT vacuum valve solution can help to address ion implantation process issues, please select from the products listed below.
Large Transfer Valve with MONOVAT
High Performance for Display and PV Production Systems Up to Gen. 6
Large Transfer Door Insert with L-VAT
Exceptional Performance for Display and PV Production Systems
16.31 × 10-7 mbar to 1.2 bar (abs)
HV Pendulum Isolation Valve
Ideal for Pump Isolation in Evaporator and Sputter Applications