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Sub-Fab Systems

Sub-fab processes can be challenging: corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can all severely affect the functionality and reliability of vacuum valves. Key functions of vacuum valves include: Prevention of backflow contamination, flow rate control and pump isolation.

Reliability, safety and availability are therefore the decisive success criteria here for vacuum valves used in sub-fab processes. Based on the experience of thousands of vacuum valve installations in sub-fab processes worldwide, the comprehensive and proven VAT vacuum valve portfolio addresses all sub-fab requirements.

To find out more about how a VAT vacuum valve solution can help to address sub-fab system issues, please select from the products listed below.

Relevant Series

HV Gate Valve with Wedge Design

09.1

1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Wedge Design

The flexible Solution for Isolation of Gas-Streams with High By-Product Content

HV Gate Valve with Protection Ring

09.1

1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Protection Ring

The Save Solution for Isolation of Gas-Streams with Very High By-Product Content

HV Gate Valve with Wedge Design

09.2

1 × 10-8 mbar to 1.2 bar (abs)

HV Gate Valve with Wedge Design

The Standard for Isolation of Gas-Streams with High By-Product Content

FV Gate Valve

12.1

1 × 10-7 mbar to 1.6 bar (abs)

FV Gate Valve

The Standard for Vacuum Isolation

HV Cylinder Valve (Angle Version)

25.0

1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Angle Version)

Maximum Conductance for Harsh Process Environments

HV Cylinder Valve (Inline Version)

25.1

1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Inline Version)

Maximum Conductance for Harsh Process Environments

HV Cylinder Valve (3/2 Way Version)

25.2

1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (3/2 Way Version)

Maximum Conductance for Harsh Process Environments

Related Products

Edge Welded Metal Bellows

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Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
  • Vacuum Pendulum Valves
  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
More about Vacuum Valves
  • Vacuum Valve Technologies
  • Case Studies
Selected Applications
  • Selected Applications
  • Semiconductor Production
  • Solar Panel Production
  • Display Production
  • Lighting Production (LED, OLED)
  • Sub-Fab Systems
  • Research
  • Scientific Instruments
  • Thin Film Coating
  • Industry
  • Medical & Pharmaceutical Applications
  • Your Application
Product Services
  • Upgrades & Retrofits
  • Spare Parts
  • Standard Repair Service
  • Fixed Price Refurbishment
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  • Careers
  • News
  • Contact
Customer Service
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