VAT Vacuum Valves VAT Edge Welded Bellows VAT Motion Components VAT Flange Connections & Seals VAT Vacuum Modules
{{ region }} English Deutsch 日本語 中文
  • About VAT
  • Careers
  • Downloads
  • Investor Relations
  • Supplier
  • Contact
VAT Vacuum Valves VAT Edge Welded Bellows VAT Motion Components VAT Flange Connections & Seals VAT Vacuum Modules
  • News
  • Vacuum Valves
    • Vaccum Valves Overview
    Categories
    • Vacuum Control Valves
    • Vacuum Isolation Valves
    • Vacuum Gate Valves
    • Vacuum Angle / Inline / Cylinder Valves
    • Vacuum Butterfly Valves
    • Vacuum Pendulum Valves
    • Pressure Relief / Venting Valves
    • Gas Dosing / Leak Valves
    • 3 Position Vacuum Valves
    • Vacuum Check Valves
    • Fast Closing / Beam Stopper Valves
    • Vacuum All-Metal Valves
    • Vacuum Transfer Valves
    • Vacuum Transfer Doors
    • Vacuum Multi-Valve Units
    More about vacuum valves
    • Vacuum Valve Technologies
    • ITER Valve Catalog
    • Case Studies
    • News
    Vacuum Valve Technologies
  • Selected Applications
    • Selected Applications
    Discover selected applications
    • Semiconductor Production
      • Process Control & Isolation
      • Substrate Transfer
      • Sub-Fab Systems
    • Solar Panel Production
      • Solar Thin Film Deposition
      • Sub-Fab Systems
    • Display Production
      • Display Dry Etching
      • Sputtering
      • Thin-film Encapsulation (CVD)
      • OLED Evaporation
      • Ion Implanting
      • CVD
      • OLED Inkjet Printing
      • Sub-fab Systems
    • Lighting Production (LED, OLED)
      • Lighting Thin Film Deposition
      • Sub-Fab Systems
      • Lighting Etching
    • Sub-Fab Systems
    • Research
      • Space Simulation
      • High Energy Physics
    • Scientific Instruments
      • Mass Spectrometry & Gas Analysis
      • Electron Microscopy, Metrology, Inspection & Defect Review
    • Thin Film Coating
    • Industry
      • Vacuum Furnaces
      • Vacuum Transportation
      • Battery Production
      • Crystal Growth
      • Vacuum Drying
    • Medical & Pharmaceutical Applications
      • Proton Therapy
      • Positron Emission Tomography (PET)
      • Vacuum Sterilization
      • Pharmaceutical Freeze Drying
    • Your Application
    Your Application
  • Product Services
    • Upgrades & Retrofits
    • Spare parts
    • Standard Repair Service
    • Fixed Price Refurbishment
    • VAT Service Centers
{{ region }} English Deutsch 日本語 中文
  • Home
  • Vacuum Valves
  • Vacuum Transfer Valves

Vacuum Transfer Valves

Valves with rectangular cross-section for connecting vacuum chambers. Feature: Substrates processed in the vacuum or process chambers are moved through the valves. VAT offers customized solutions for different customer requirements.

02.4

Large Transfer Valve with MONOVAT

High Performance for Display and PV Production Systems Up to Gen. 6

02.7

Roll-to-Roll Transfer Valve with MONOVAT

High Performance for Web/Foil Production Systems

04.2 1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Valve with L-VAT

For Load Lock and Process Chamber Isolation

04.3 1 × 10-6 mbar to 1.1 bar (abs)

HV Transfer Valve with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes

05.2 1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Insert with L-VAT

For Load Lock and Process Chamber Isolation

05.3 1 × 10-9 mbar to 1.1 bar (abs)

HV Transfer Valve Insert with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes

06.1

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems

06.3

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems - Atmospheric Pressure Version

06.6

Large Transfer Valve / Insert / Door with SOLVAT

High Performance for PV and Large Coating Systems

06.8

Large Transfer Valve / Insert / Door with FLAPVAT

High Performance for PV and Large Coating Systems

{{ region }} English Deutsch 日本語 中文
Scroll to Top
Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
  • Vacuum Pendulum Valves
  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
More about Vacuum Valves
  • Vacuum Valve Technologies
  • Case Studies
Selected Applications
  • Selected Applications
  • Semiconductor Production
  • Solar Panel Production
  • Display Production
  • Lighting Production (LED, OLED)
  • Sub-Fab Systems
  • Research
  • Scientific Instruments
  • Thin Film Coating
  • Industry
  • Medical & Pharmaceutical Applications
  • Your Application
Product Services
  • Upgrades & Retrofits
  • Spare Parts
  • Standard Repair Service
  • Fixed Price Refurbishment
Company
  • About VAT
  • Investors Relations
  • Careers
  • News
  • Contact
Customer Service
  • Downloads

© 2022 VAT Group AG | Switzerland

  • Imprint
  • Privacy Policy
  • Terms & Conditions
  • Supplier login
This browser is no longer supported even by Microsoft. To prevent security issues, we recommend to use modern browsers like Chrome, Firefox or Edge.