02.4

Large Transfer Valve with MONOVAT

High Performance for Display and PV Production Systems Up to Gen. 6

02.7

Roll-to-Roll Transfer Valve with MONOVAT

High Performance for Web/Foil Production Systems

04.2 1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Valve with L-VAT

For Load Lock and Process Chamber Isolation

04.3 1 × 10-6 mbar to 1.1 bar (abs)

HV Transfer Valve with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes

05.2 1 × 10-9 mbar to 1.2 bar (abs)

HV Transfer Insert with L-VAT

For Load Lock and Process Chamber Isolation

05.3 1 × 10-9 mbar to 1.1 bar (abs)

HV Transfer Valve Insert with L-MOTION

Fast and Precise, Particularly Suited to Corrosive Processes

06.1

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems

06.3

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems - Atmospheric Pressure Version

06.6

Large Transfer Valve / Insert / Door with SOLVAT

High Performance for PV and Large Coating Systems

06.8

Large Transfer Valve / Insert / Door with FLAPVAT

High Performance for PV and Large Coating Systems