Solar Thin Film Deposition
Solar panel manufacturers use a variety of coating processes (CVD, ALD, MBE, PVD, etc.) to produce the ultra-thin films that make up the performance o...
The 02.7 Roll-to-Roll Transfer Valve MONOVAT has been developed to meet the special requirements of continues web/foil coating processes. To ensure reliable sealing of the process chamber in line with protecting the web/foil band in continues coating processes the 02.7 is using a sophisticated roll-to-roll sealing system. The sealing system is based on VAT’s proven MONOVAT sealing technology. With the double sealing roll-to-roll design the sealing pressure is perfectly balanced between effective sealing and not damaging the web/foils. An intermediate pumping stage between both seals adds to the sealing performance.
Designed for high cycle production systems the 02.7 combines an outstanding fast motion time (≤ 1.5 s) with resistance against process-related deposits that would limit standard valve performance.
The special MONOVAT sealing technology used by the 02.7 allows a shock-free opening and closing movement of the gate minimizing particle activation and reducing seal wear. Furthermore, the for a double sealing system very compact design of the sealing mechanism also makes the whole valve very compact providing small mounting dimensions.
Operating already in hundredths web/foil production systems around the world under various process conditions, the 02.7 series has proven its outstanding performance in all aspects.
The 02.7 Roll-to-Roll Transfer Valve MONOVAT is tailored to exact customer specification like all VAT transfer valve solutions. Elements of these customization are a solenoid valve for impulse actuation, special surface treatments like hard anodized or nickel-plated aluminum, bellows sealed feedthrough and more.
|Sizes||50 × 300 mm (1.97" × 11.81") to
50 × 1250 mm (1.97" × 49.21")
|Actuator||Pneumatic||Double acting with position indicator|
|Body Material||Aluminum or Stainless Steel|
|Feedthrough||Shaft Feedthrough with intermediate pumping|
|Leak Rate||Valve Body||< 1 × 10-5 mbar ls-1|
|Valve Seat||< 1 × 10-5 mbar ls-1|
|§Differential Pressure||On the Gate||≤ 1 bar|
|At Opening||≤ 5 mbar|
|Cycles until first Service||10 000|
|Closing or opening time||≤ 1.5 s (with 50 mm opening height)|
|Temperature||Aluminium Valve Body/Gate||≤ 120 °C|
|Stainless Steel Valve Body/Gate||≤ 150 °C|
|Actuator, Position Indicator||≤ 80 °C|
|Temperature Difference Body/Gate||≤ 25 °C|
|Material||Aluminium Valve Body/Gate||EN AW-5083 (3.3547)|
|Stainless Steel Valve Body/Gate||AISI 304 (1.4301)|
|Actuator Shafts||AISI 304 (1.4301)|
|Seal||Gate, Flanges, Feedtrough||FKM (Viton®)|
|Mounting Position||Actuator Up or Down|
|Position Indicator||Voltage||10 – 30 V DC PNP (NPN optional)|
|Tensile force of the foil on the gate||max. 0.5 N per mm (e.g. width of foil 300 mm, max tensile force 150 N)|