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  • Vacuum Angle / Inline / Cylinder Valves

Vacuum Angle / Inline / Cylinder Valves

Universal vacuum valves for pumping systems, process or venting applications. Ideal for vacuum isolation or control in demanding installation situations. With VAT bellows, suitable for UHV.

21.4 1 × 10-8 mbar to 10 bar (abs)

FV Mini Angle / Inline Valve

Uncompromised Reliability for Sealing or Venting Without Compressed Air

24.4 1 × 10-7 mbar to 5 bar (abs)

FV Angle Valve

Uncompromised Reliability for Large Volume Flows

24.5 1 × 10-7 mbar to 5 bar (abs)

FV Inline Valve

Uncompromised Reliability for Large Volume Flows

25.0 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Angle Version)

Maximum Conductance for Harsh Process Environments

25.1 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Inline Version)

Maximum Conductance for Harsh Process Environments

25.2 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (3/2 Way Version)

Maximum Conductance for Harsh Process Environments

26.4 DN 10– 40

HV Angle Valve

For pumping and venting of HV systems.

26.5 DN 10– 40

HV Inline Valve

Uncompromised Reliability

28.4 5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly Low Outgassing Performance

29.0 1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses (DN 25 - 80)

29.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses

29.2 1 × 10-7 mbar to 2 bar (abs)

HV Angle Valve with Soft-Pump Function

Avoids Turbulence or Condensation, Large Conductance Spectrum (DN 100 - 160)

54.1 XHV to 2 bar (abs)

UHV All-Metal Angle Valve - Easy Close

For Extreme UHV Requirements

59.0 UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For Extreme UHV Requirements

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Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
  • Vacuum Pendulum Valves
  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
More about Vacuum Valves
  • Vacuum Valve Technologies
  • Case Studies
Selected Applications
  • Selected Applications
  • Semiconductor Production
  • Solar Panel Production
  • Display Production
  • Lighting Production (LED, OLED)
  • Sub-Fab Systems
  • Research
  • Scientific Instruments
  • Thin Film Coating
  • Industry
  • Medical & Pharmaceutical Applications
  • Your Application
Product Services
  • Upgrades & Retrofits
  • Spare Parts
  • Standard Repair Service
  • Fixed Price Refurbishment
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