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  • Vacuum Angle / Inline / Cylinder Valves

Vacuum Angle / Inline / Cylinder Valves

Universal vacuum valves for pumping systems, process or venting applications. Ideal for vacuum isolation or control in demanding installation situations. With VAT bellows, suitable for UHV.

21.4 1 × 10-8 mbar to 10 bar (abs)

FV Mini Angle / Inline Valve

Uncompromised Reliability for Sealing or Venting Without Compressed Air

24.4 1 × 10-7 mbar to 5 bar (abs)

FV Angle Valve

Uncompromised Reliability for Large Volume Flows

24.5 1 × 10-7 mbar to 5 bar (abs)

FV Inline Valve

Uncompromised Reliability for Large Volume Flows

25.0 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Angle Version)

Maximum Conductance for Harsh Process Environments

25.1 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (Inline Version)

Maximum Conductance for Harsh Process Environments

25.2 1 × 10-8 mbar to 3 bar (abs)

HV Cylinder Valve (3/2 Way Version)

Maximum Conductance for Harsh Process Environments

26.4 1 × 10-8 mbar to 2 bar (abs)

HV Angle Valve

Uncompromised Flexibility and Reliability

26.5 1 × 10-8 mbar to 5 bar (abs)

HV Inline Valve

Uncompromised Reliability

28.4 5 × 10-10 mbar to 5 bar (abs)

UHV Angle Valve

Outstandingly Low Outgassing Performance

29.0 1 × 10-8 mbar to 1.2 bar (abs)

HV Angle Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses (DN 25 - 80)

29.1 1 × 10-8 mbar to 1.2 bar (abs)

HV Inline Valve with Soft-Pump Function

Pumping, Venting Without Turbulence or Pressure Pulses

29.2 1 × 10-7 mbar to 2 bar (abs)

HV Angle Valve with Soft-Pump Function

Avoids Turbulence or Condensation, Large Conductance Spectrum (DN 100 - 160)

54.1 XHV to 2 bar (abs)

UHV/XHV All-Metal Angle Valve - Easy Close

For Extreme UHV Requirements

59.0 UHV to 10 bar (abs)

UHV All-Metal Variable Leak Valve

For Extreme UHV Requirements

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Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
  • Vacuum Pendulum Valves
  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
More about Vacuum Valves
  • Vacuum Valve Technologies
  • Case Studies
Selected Applications
  • Selected Applications
  • Semiconductor Production
  • Solar Panel Production
  • Display Production
  • Lighting Production (LED, OLED)
  • Sub-Fab Systems
  • Research
  • Scientific Instruments
  • Thin Film Coating
  • Industry
  • Medical & Pharmaceutical Applications
  • Your Application
Product Services
  • Upgrades & Retrofits
  • Spare Parts
  • Standard Repair Service
  • Fixed Price Refurbishment
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  • Investors Relations
  • Careers
  • News
  • Contact
Customer Service
  • Downloads

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