Easy Close, Reliable Isolation

The 54.1 All-Metal Angle Valve is equipped with FLEX VATRING, a “hard on hard” sealing technology. This dynamic, all-metal sealing system is characterized by consistent sealing and constant closing forces. It enables high sealing forces with comparable low axial forces. The sealing partners are made from stainless steel and they are deformed elastically only. The FLEX VATRING is easily exchangeable on side. It may be baked to 300 °C in open and close position and is capable of a lifetime of over 1000 cycles when operated under clean conditions.

Already installed in thousands of demanding applications under various process conditions, the 54.1 series has proven its outstanding reliability. It has become the standard solution for vacuum isolation in UHV and XHV applications.

No torque wrench is required as the valve is easy to operate with a standard hexagon wrench. With its robust design and a high conductance the valve is suitable for many different vacuum applications.


A key feature of the 54.1 series is that the FLEX VATRING all-metal seal is easy to replace when the seal has worn out. While “hard-on-hard” all-metal seals often require re-machining of the valve seat, the 54.1 valve series is designed so that the replacement FLEX VATRING seals in a new area of the valve seat rather than in the same position as the former ring seal. The FLEX VATRING can be replaced twice due to its three-level sealing seat.

The standard flange is CF-R fixed in place.

Key features of the 54.1 UHV/XHV All-Metall Angle Valve


  • High conductance
  • FLEX VATRING all-metal „hard-on-hard“ sealing
  • Easy close mechanism – no torque wrench required


  • Reliable performance under extreme UVH requirements
  • No maintenance required within the specified life time.
  • Low cost of ownership

Technical data
Sizes   DN 16 (⅝"), DN 40 (1½"), DN 63 (2½")
Actuator Manual Hexagon Head
Body Material   Stainless Steel
Feedthrough   Bellows
Standard Flanges   CF-R
Leak Rate Valve Body < 1 × 10-10 mbar ls-1
  Valve Seat < 1 × 10-10 mbar ls-1
Pressure Range   XHV to 2 bar (abs)
Differential Pressure on the Plate   ≤ 2 bar
Differential Pressure at Opening   ≤ 1 bar
Lifetime   ≥ 1 000 Cycles
Bake-Out Temperature in open and closed position ≤ 300 °C
Heating and Cooling Rate   ≤ 60°C h-1
Material Valve Body AISI 316L (1.4404, 1.4435)
  Mechanism AISI 316L (1.4404, 1.4435)
  Bellows AISI 316L (1.4404, 1.4435)
Seal Bonnet Metal (Silver Plated)
  Gate Metal (Silver Plated)
Mounting Position   Any
Valve Position Indication   Visual (Mechanical)
Conductance (Molecular Flow) DN 16
DN 40
DN 63
5 ls-1
50 ls-1
105 ls-1
Closing Force   Closes at a mechanical stop
Weight DN 16
DN 40
DN 63
0.4 kg / 0.9 lbs
1.9 kg / 4.2 lbs
5.9 kg / 13 lbs


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