The volume manufacturing of multilayer stacks with etching processes requires optimal sealing technology (with self-cleaning function) and an overall robust tool design for high uptime. VAT vacuum valve solutions provide innovative functionality to ensure increased process safety and enhanced tool uptime.
To find out more about how a VAT vacuum valve solution can help to address etching process issues, please select from the products listed below.
Large Transfer Valve with MONOVAT
High Performance for Display and PV Production Systems Up to Gen. 6
07.71 × 10-7 mbar to 1 bar (abs)
Large Transfer Door Insert with L-VAT
Exceptional Performance for Display and PV Production Systems
61.31 × 10-8 mbar to 1.2 bar (abs)
Butterfly Control Valve
Fast and Precise Downstream Pressure Control