Outstanding Pressure Control and Isolation Under All Conditions

The 61.6 HV Control Butterfly Valve delivers outstanding pressure control and isolation performance. With its fast and precise acting motion controller (0.45s) it’s the perfect solution for fine control and isolation in CVD processes. The plate acts as a throttling element and varies the conductance of the valve opening. The integrated pressure controller of the 61.6 calculates the required plate position to achieve the set pressure as fast as possible.

The 61.6 series isolation function is specially designed to avoid the characteristic higher seal wear of butterfly valves. With it out-of-center plate shaft and the special geometry of the valve body and seal seat, seal friction is minimized and the sealing performance is increased.

Already installed in thousands of demanding applications under various process conditions, the 61.6 series has proven its outstanding reliability. With a robust design and direct mounting option, as well as reduced and easy maintenance, the 61.6 series convinces in all aspects.

Various design options in body material, surface treatment, elastomers, flange connections, sealing material, special sizes as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) simplify the integration of the 61.6 series into various vacuum applications.


61.6 HV Control Butterfly Valves are available in aluminum or stainless steel with standard flange connectors in ISO-KF and ISO-F. Customer-specific flanges can be integrated, as well as special features like integrated heater with insulation. Some FFKM/FKM elastomers are available on request (FKM Viton® is standard).

Key features of the 61.6 HV Control Butterfly Valve


  • Excellent pressure control and isolation
  • Very fast operation
  • On-board software for local operation
  • Reliable operation in harsh process conditions


  • Better process controllability
  • High uptime / unrestricted performance
  • Low cost of operation
Technical data

DN 40 ("), DN 50 (2"), DN 63 ("),
DN 80 (3"), DN 100 (4")

Actuator   Integrated Controller with Stepper Motor
Body Material   Hard anodized Aluminium or Stainless Steel
Standard Flanges   ISO-KF, ISO-F
Leak Rate: Valve Body Hard anodized Alumiun
Stainless Steel
< 1 × 10-5 mbar ls-1
< 1 × 10-9 mbar ls-1
Leak Rate: Valve Seat Hard anodized Alumiun
Stainless Steel
< 1 × 10-4 mbar ls-1
< 1 × 10-9 mbar ls-1
Pressure Range Hard anodized Alumiun
Stainless Steel
< 1 × 10-6 mbar
< 1 × 10-8 mbar to 1.2 bar
Cycles until First Service Pressure Control
2 million
250 000 (DN 40 - 50)
100 000 (DN 63 - 100)
Temperature Valve Body ≤ 120 °C
Material Alu Valve Body/Plate
SS Valve Body/Shaft
EN AW-6082 (3.2315)
AISI 316L (1.4404 or 1.4435)
Seal Plate
FKM (e.g. Viton®)
FKM (e.g. Viton®)
Feedthrough   Rotary Feedthrough
Mounting Position   Valve Seat towards Chamber


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