Outstanding Pressure Control and Isolation Under All Conditions

The 61.6 HV Control Butterfly Valve delivers outstanding pressure control and isolation performance. With its fast and precise acting motion controller (0.45 s) it’s the perfect solution for fine control and isolation in CVD processes. The plate acts as a throttling element and varies the conductance of the valve opening. The integrated pressure controller of the 61.6 calculates the required plate position to achieve the set pressure as fast as possible.

The 61.6 series isolation function is specially designed to avoid the characteristic higher seal wear of butterfly valves. With it out-of-center plate shaft and the special geometry of the valve body and seal seat, seal friction is minimized and the sealing performance is increased.

Already installed in thousands of demanding applications under various process conditions, the 61.6 series has proven its outstanding reliability. With a robust design and direct mounting option, as well as reduced and easy maintenance, the 61.6 series convinces in all aspects.

Various design options in body material, surface treatment, elastomers, flange connections, sealing material, special sizes as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) simplify the integration of the 61.6 series into various vacuum applications.


61.6 HV Control Butterfly Valves are available in hard anodized aluminium or stainless steel with standard flange connectors in ISO-KF and ISO-F. Customer-specific flanges can be integrated, as well as special features like integrated heater with insulation. FFKM/FKM elastomers are available on request (FKM is standard).

Main features of the 61.6 HV Butterfly Control and Isolation Valve


  • Excellent pressure control and isolation
  • Very fast operation
  • On-board software for local operation
  • Reliable operation in harsh process conditions


  • Better process controllability
  • High uptime / unrestricted performance
  • Low cost of operation
  • Technical data
  • Downloads

DN 40 (1 ½"), DN 50 (2"), DN 63 (2 ½"),
DN 80 (3"), DN 100 (4")

Actuator   Integrated Controller with Stepper Motor, field oriented control (foc)
Body Material   Hard anodized Aluminum or Stainless Steel
Standard Flanges   ISO-KF, ISO-F
Leak Rate: Valve Body Hard anodized Alumiun
Stainless Steel
< 1 × 10-5 mbar ls-1
< 1 × 10-9 mbar ls-1
Leak Rate: Valve Seat Hard anodized Alumiun
Stainless Steel
< 1 × 10-4 mbar ls-1
< 1 × 10-9 mbar ls-1
Pressure Range Hard anodized Alumiun
Stainless Steel
< 1 × 10-6 mbar to 1.2 bar (abs)
< 1 × 10-8 mbar to 1.2 bar (abs)
Cycles until First Service Pressure Control
2 million
250 000 (DN 40 - 50)
100 000 (DN 63 - 100)
Temperature Valve Body ≤ 120 °C
Material Alu Valve Body/Plate
SS Valve Body/Shaft
EN AW-6082 (3.2315)
AISI 316L (1.4404 or 1.4435)
Seal Plate
Feedthrough   Rotary Feedthrough
Mounting Position   Valve Seat towards Chamber


Scroll to:
Scroll to:
Specify standard product

Get to the product details to specify your requirements to get a quote or to get a specific CAD data download.

Customized Solution

Specify your customized solution.

If you have your specification already at hand, please upload it and submit it to us. We are happy to send you a quote.