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CVD

The chemical vapor deposition (CVD) processes are used e.g. for thin-film encapsulations to ensure the durability of a display and protect it from environmental influences. CVD processes must be run under controlled atmospheric conditions that require precise control of gas flows and pressure conditions in the process chamber. VAT vacuum and gas dosing valves for CVD processes are specially designed for these conditions.

Precision & durability

VAT vacuum and gas dosing valves for CVD processes offer not only very precise control and but also high resistance in contact with aggressive media. This increases production quality and availability, and thus overall profitability. 

To learn more about how a VAT vacuum valve solution can help solve CVD challenges, please select from the products listed below.

Relevant Series

Large Transfer Valve / Insert with TWINVAT

06.1

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems

Large Transfer Valve / Insert with TWINVAT

06.3

Large Transfer Valve / Insert with TWINVAT

High Performance for Display Production Systems - Atmospheric Pressure Version

Large Transfer Door Insert with L-VAT

07.7

Large Transfer Door Insert with L-VAT

Exceptional Performance for Display and PV Production Systems

HV Angle Valve

26.4

DN 10– 40

HV Angle Valve

Uncompromised Flexibility and Reliability

HV Inline Valve

26.5

DN 10– 40

HV Inline Valve

Uncompromised Reliability

Butterfly Control Valve

61.3

1 × 10-8 mbar to 1.2 bar (abs)

Butterfly Control Valve

Fast, Precise Downstream Pressure Control

HV Control and Isolation Valve Combo Unit

95.3

DN 25 –DN 50

HV Control and Isolation Valve Combo Unit

Compact High Performance

Related Products

Edge Welded Metal Bellows

Related Products

Flange Connections and Seals

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Vacuum Valves
  • Vaccum Valves Overview
  • Vacuum Gate Valves
  • Vacuum Angle / Inline / Cylinder Valves
  • Vacuum All-Metal Valves
  • Vacuum Pendulum Valves
  • Vacuum Butterfly Valves
  • 3 Position Valves
  • Vacuum Control Valves
  • Vacuum Transfer Valves
  • Vacuum Transfer Doors
  • Pressure Relief / Venting Valves
  • Gas Dosing Valves
  • Fast Closing / Beam Stopper Valves
  • Vacuum Multi Valve Modules
More about Vacuum Valves
  • Vacuum Valve Technologies
  • Case Studies
Selected Applications
  • Selected Applications
  • Semiconductor Production
  • Solar Panel Production
  • Display Production
  • Lighting Production (LED, OLED)
  • Sub-Fab Systems
  • Research
  • Scientific Instruments
  • Thin Film Coating
  • Industry
  • Medical & Pharmaceutical Applications
  • Your Application
Product Services
  • Upgrades & Retrofits
  • Spare Parts
  • Standard Repair Service
  • Fixed Price Refurbishment
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