Sub-fab processes can be challenging: corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can all severely affect the functionality and reliability of vacuum valves. Key functions of vacuum valves include: Prevention of backflow contamination, flow rate control and pump isolation.
Reliability, safety and availability are therefore the decisive success criteria here for vacuum valves used in sub-fab processes. Based on the experience of thousands of vacuum valve installations in sub-fab processes worldwide, the comprehensive and proven VAT vacuum valve portfolio addresses all sub-fab requirements.
To find out more about how a VAT vacuum valve solution can help to address sub-fab system issues, please select from the products listed below.