Sub-Fab Systems
Sub-fab processes can be challenging: corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can al...
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Reliable High-Speed Protection
The main requirement of a modern shut-off valve is its reliable and fast acting emergency isolation on any backflow event. The 25.7 is designed to provide a sensitive, high-speed isolation function that reliably prevents the risk of backflow into a process chamber or pipe system.
The 25.7 HV Quick Shut-Off Valve is flow controlled. The direct operating design without any subsystem (sensor and actuator) provides high-speed isolation with low complexity and low failure risk. With less than 10 milliseconds from the initial backflow impulse to full isolation the 25.7 leads its class.
As a safety solution, a shut-off valve should ideally add no conductance barrier to the system. The 25.7’s special flow-optimized design sets the standard in this regard, delivering a perfect balance between high conductance and fast isolation.
When used in processes with by-products in the gas stream, e.g. foreline applications, any accumulation of contamination on a quick shut-off valve reduces conductance and can negatively influence its isolation capabilities. This process related challenge is adressed by a special surface coating which minimizes accumulation for most by-products significantly. An additional heating option is available to avoid process gas condensation at the valve surface.
open
emergency closure in case of backflow
closed
The 25.7 HV Quick Shut-Off Valve is available in sizes from DN 50 - 160mm (2“ - 6”). The valve body is made of stainless steel. The standard flange is ISO-K for DN63 to DN160 (2½ “ - 6”) and ISO-KF for DN50 (2“).
For applications with very aggressive process gases, FFKM seals are available.
Key features of the 25.7 HV Quick Shut-Off Valve
Features:
- Flow-controlled movement
- Outstandingly fast reaction time
- Optimized conductance
- Special surface coating to minimize by-product contamination
Benefits:
- High level of protection
- Extended lifetime
- Easy installation
- Low cost of ownership
Technical data
| Sizes | DN 100 (4") | ||
|---|---|---|---|
| Body Material | Stainless Steel | ||
| Standard Flanges | ISO-K | ||
| Leak Rate | Valve Body | < 1 × 10-9 mbar ls-1 | |
| Valve Seat | < 1 × 10-6 mbar ls-1 | ||
| Pressure Range | Vacuum to 1.2 bar (abs) | ||
| Differential Pressure | On the Gate | ≤ 1 bar | |
| Conductance (laminar flow) | 70 ls-1 | ||
| Cycles until first Service | recommended after each backflow event or with regular maintenance cycles |
||
| Temperature | Valve Body | ≤ 200 °C | |
| Heating and Cooling Rate | ≤ 50 °C h-1 | ||
| Material | Valve Body | AISI 304 (1.4301) | |
| Plate | AISI 304 (1.4301) | ||
| Seal | Bonnet | FKM | |
| Gate | FKM | ||
| Mounting Position | Fore line installation vertical only plate facing chamber |
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| Trigger Pressure | at the Gate | ≥ 5 mbar | |
| Closing Time | Plate Move Time | ≤ 10 ms | |
| Weight | 3.7 kg / 8.16 lbs | ||