Precision & Stability

The VAT vacuum valve portfolio for thin film deposition processes is designed for precise, stable operation even under changing process conditions. Key features include precise gas flow control even at low conductance levels, minimized residual gas and particulate emissions, and a modular design that allows the required vacuum valves to be optimally configured to meet specific process requirements.

To find out more about how a VAT vacuum valve solution can help to address a range of thin film deposition issues, please select from the products listed below.