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  • Jun 08, 2022 Product News

    Ultra Clean Vacuum - VAT Perfects Particle Management

    With new approaches in particle management, VAT sets standards for ultra clean vacuum requirements. The goal is maximum avoidance of unwanted particles and outgassing.

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    Apr 01, 2022 Product News

    Bonded Seals a Key Element in VAT's Vacuum Valve Technology

    Bonded valve plate seals offer a number of advantages over classic O-ring seals – including longer durability, improved sealing and damping properties.

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    Mar 17, 2022 Product News

    Reproducible Behavior of High-Performance Vacuum Valves

    As semiconductor production becomes more complex in microprocessor architecture and in the type and size of layers and structures, the room for variation in production process conditions also becomes smaller. Process stability and controllability are key elements for success here.

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    Feb 24, 2022 Product News

    Added Value with Integration in Semiconductor Fabrication

    Semiconductor chips now are abundantly used for an increasing variety of challenging applications. VAT evolves from a supplier of vacuum components towards a system integrator to support the development of increasingly complex semiconductor production lines.

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    Feb 03, 2022 Product News

    Vacuum Valve Seals: Every Detail Counts

    The development of specific sealing technologies is a decisive feature of VAT's competitiveness. Where standard solutions reach their limits, VAT vacuum valves offer process system operators more functional reliability. Especially in the field of classic elastomer seals, VAT sets standards.

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    Jan 03, 2022 Product News

    Fixed Price Refurbishment: How to Optimize Vacuum Valve Maintenance and Service Costs

    VAT “Fixed Price Refurbishment Programs” help system operators – in particular, semiconductor, display, solar and lightning companies – improve system uptime and also optimize service costs.

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    Dec 09, 2021 Product News

    Optimized Version of Large Transfer Valve for OLED, PVD and Load-Lock

    With the new 06.3 Large Transfer Valve / Insert with TWINVAT, VAT offers an optimized version of its successful 06.1 series, especially for OLED, PVD and load-lock applications.

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    Oct 22, 2021 Product News

    Order for new 29.2 HV Angle Valve with Soft-Pump Function from Large Display OEM

    Leading plant manufacturer of large production machines for TV displays awards VAT the contract to supply the new 29. 2 HV Angle Valve with Soft-Pump Function.

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    May 03, 2021 Product News

    Enhancing Performance & Process Stability with VAT Upgrades & Retrofits

    Semiconductor production equipment must pay for itself quickly - the very next innovation cycle increases the cost pressure. Aging equipment makes this a challenge. VAT therefore offers upgrades & retrofits as a cost-effective solution for optimizing existing production equipment.

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    Apr 06, 2021 Product News

    Advance Controllability – VAT Shifts from IC1 to IC2 Controller Technology

    As the IC1 controller components used in VAT vacuum valves reach their technological ‘end of life,’ the advanced 32-bit IC2 components are being integrated into new and existing applications. VAT specialists are working with customers to ensure a rapid and problem-free transition.

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    Vacuum Valves
    • Vaccum Valves Overview
    • Vacuum Gate Valves
    • Vacuum Angle / Inline / Cylinder Valves
    • Vacuum All-Metal Valves
    • Vacuum Pendulum Valves
    • Vacuum Butterfly Valves
    • 3 Position Valves
    • Vacuum Control Valves
    • Vacuum Transfer Valves
    • Vacuum Transfer Doors
    • Pressure Relief / Venting Valves
    • Gas Dosing Valves
    • Fast Closing / Beam Stopper Valves
    • Vacuum Multi Valve Modules
    More about Vacuum Valves
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