Ultra Clean Vacuum - VAT Perfects Particle Management
With new approaches in particle management, VAT sets standards for ultra clean vacuum requirements. The goal is maximum avoidance of unwanted particles and outgassing.
Bonded valve plate seals offer a number of advantages over classic O-ring seals – including longer durability, improved sealing and damping properties.
As semiconductor production becomes more complex in microprocessor architecture and in the type and size of layers and structures, the room for variation in production process conditions also becomes smaller. Process stability and controllability are key elements for success here.
Semiconductor chips now are abundantly used for an increasing variety of challenging applications. VAT evolves from a supplier of vacuum components towards a system integrator to support the development of increasingly complex semiconductor production lines.
The development of specific sealing technologies is a decisive feature of VAT's competitiveness. Where standard solutions reach their limits, VAT vacuum valves offer process system operators more functional reliability. Especially in the field of classic elastomer seals, VAT sets standards.
VAT “Fixed Price Refurbishment Programs” help system operators – in particular, semiconductor, display, solar and lightning companies – improve system uptime and also optimize service costs.
With the new 06.3 Large Transfer Valve / Insert with TWINVAT, VAT offers an optimized version of its successful 06.1 series, especially for OLED, PVD and load-lock applications.
Leading plant manufacturer of large production machines for TV displays awards VAT the contract to supply the new 29. 2 HV Angle Valve with Soft-Pump Function.
Semiconductor production equipment must pay for itself quickly - the very next innovation cycle increases the cost pressure. Aging equipment makes this a challenge. VAT therefore offers upgrades & retrofits as a cost-effective solution for optimizing existing production equipment.
As the IC1 controller components used in VAT vacuum valves reach their technological ‘end of life,’ the advanced 32-bit IC2 components are being integrated into new and existing applications. VAT specialists are working with customers to ensure a rapid and problem-free transition.