Reliable Isolation Under All Conditions

The 16.2 HV Pendulum Isolation Valve provides reliable isolation performance combined with low particle count and low particle activation. The excellent particle performance is achieved by an exceptionally smooth opening and closing motion.

It is ideal for isolation requirements in harsh processes such as in evaporator and sputter applications. The 16.2 valve provides a 3-position pneumatic, single acting with closing spring or a standard pneumatic, single acting with closing spring.

With its special split body design it allows maintenance without any disassembly of pipe connections or process chamber connections. Its slim design allows to mount the 16.2 directly to a process chamber, eliminating e.g. the volume normally required in a chamber - valve - pump connection.

With its robust design as well as a variety of design options, the 16.2 series is easy to integrate into various vacuum processes.

Already installed in hundreds of batch and inline production systems around the world under various process conditions, the 16.2 series has proven its outstanding performance in all aspects.

Pneumatic
3-position pneumatic

The 16.2 HV Pendulum Isolation Valve is available in aluminum, the body hard anodized or nickel-plated with standard flange connectors in ISO-F, ASA-LP and JIS. Customer-specific flanges can be integrated. Further options are ports for roughing (by-pass), venting or for gauges, heating solution as well as a window in the plate with borosilicate or sapphire glass.


Key features of the 16.2 HV Pendulum Isolation Valve

Features:

  • Reliable isolation in harsh process environments
  • Low shock operation, low particle activation
  • Process inert – very low residual out gassing (RGA)

Benefits:

  • High uptime
  • Low cost of operation
  • Adjustable to process requirements
  • Technical data
  • Downloads
Sizes   DN 200 (8"), DN 250 (10"), DN 320 (12"),
DN 350 (14"), DN 400 (16"), DN 500 (20")
Actuators Pneumatic Single acting with closing spring (NC)
  3-Position Pneuatic Single acting with closing spring (NC)
Body Material   Aluminium
Feedthrough   Rotary feedthrough
Standard Flanges   ISO-F, ASA-LP, JIS
Leak Rate Valve body, valve seat < 1 × 10-8 mbar ls-1
Pressure range   1 × 10-8 mbar to 1.2 bar (abs)
Differential pressure on the plate   ≤ 1.2 bar
Differential pressure at opening DN 200
DN 250 - 500
≤ 10 mbar
≤ 5 mbar
Cycles until first service   200 000
Temperature Valve body
Actuator
Solenoid valve
Position indicator
≤ 120 °C
≤ 80 °C
≤ 50 °C
≤ 80 °C
Heating and cooling rate   ≤ 30 °C h-1
Material Valve body, plate, sealing ring
DN 200-400
DN 500
Feedtrough (parts in contact with media)

EN AW-5083 (3.3547), EN AW-6082 (3.2315)
EN AC-42100 (3.2371)
AISI 303 (1.4305), AISI 304 (1.4301)
Seal Bonnet, plate, dynamic, feedthrough FKM (Viton®)
Mounting position   Any
Solenoid valve   24 V DC, 5.4 W (others on request)
Position indicator Voltage
Current
≤ 50 V AC/DC
≤ 1.2 A
Valve position indication   Visual (mechanical)

 

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Customized Solution

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