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Series

07.0 HV Transfer Door Insert with LINVAT

Series

07.0 HV Transfer Door Insert with LINVAT

Article number

07015-UA24

High Performance for EFEM and Load Lock Applications

Technical data
Downloads

Size

65 x 420 mm (2.56" x 16.5")

Flange

Door, parallel to mounting surface

Material

Stainless steel

Actuator

Pneumatic: double acting

Position Indication Signal

Yes

Solenoid

Pressure Min.

1 × 10^-⁹ mbar

Pressure Max.

1.03 bar (abs)

Conductance

9 ls⁻¹

Differential Pressure on Plate

≤ 1 bar

Differential Pressure at opening

≤ 30 mbar

Close open time

≤ 1.2 s

Max. temperature valve body

≤ 120 °C

Max. Temperature Actuator

≤ 80 °C

Weight

8.5 kg / 18.74 lbs

Add-Ons for Your Product

Valve

Alternative materials

Door

Additional ports

Gate

O-ring seal

Gate nickel-plated

Gate hardanodized

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