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Series

65.3 HV Pendulum Control Valve

Series

65.3 HV Pendulum Control Valve

Article number

65348-PHWF

1 × 10^-8 mbar to 1 bar (abs)

Optimized Downstream Pressure Control & Vacuum Isolation in SEMI & Display Systems

Technical data
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Size

DN 250 (10")

Flange

ISO-F

Material

Aluminum hard anodized

Actuator

Stepper motor

Position Indication Signal

Solenoid

Pressure Min.

1 × 10^-⁶ mbar

Pressure Max.

1.2 bar (abs)

Differential Pressure on Plate

≤ 1 bar

Differential Pressure at opening

≤ 1 bar

Conductance

22000 ls⁻¹

Min. compressed air pressure

4 bar / 58 psi

Max. compressed air pressure

7 bar / 102 psi

Max. temperature valve body

≤ 120 °C

Open to close

3 s

Close to open

4 s

Pressure control (throttling) default speed

0.9 s

Pressure control (throttling) fast speed

0.5 s

Controller Configuration

SPS, PFO and VC master

Controller interface + sensors

Profibus / 2 sensors

Weight

29 kg / 64 lbs

Add-Ons for Your Product

Valve

Customer specific flange

Alternative materials

Alternative surface finishing

Gate

Alternative sealing materials

Actuator

Ultra fast version

Temperature Management

Heater with insulation jacket

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Series