Reliable Isolation with Uniform Gate Compression

The 05.3 Transfer Insert with L-Motion technology is particularly suited to corrosive processes such as etch or CVD. The L-Motion technology delivers L-motion of the gate by a single-shaft pneumatic actuator. In this L-motion the gate is moved vertically into close position without any contact to the valve body and in the final movement it is pushed horizontally to the gate seat, with the seal touching the gate seat at the same time at exactly the same pressure. Not only does this avoid any friction and with it potential particle generation, it also minimizes seal wear.

To minimize particle generation and activation further, the gates are fitted with vulcanized seals. This is a highly reliable and more durable sealing solution then a standard O-ring sealing, although standard O-ring sealing is available as an option. The shaft feedthrough is sealed with highly durable metal welded bellows.

To ensure the same sealing level over the entire length of the gate, the gate is fitted with a special compression bar. The bar guaranties an even distribution of the sealing pressure in every area of the gate.

In case of power failure, the 05.3 can be pneumatically locked in close position.

The 05.3 Transfer Insert with L-Motion are designed for extended maintenance-free operation (up to
≤ 3 million cycles until first service).

Already installed in hundreds of demanding applications in various semiconductor production processes, the 05.3 series haven proven their outstanding reliability. With a robust design as well as reduced and easy maintenance, the 05.3 series convinces in all aspects.


Insert 05.3

Closed
Optically closed
Open

The 05.3 Transfer Insert with L-Motion are always tailored to customer specifications. However, there are four basic predefined designs: two valve types with bonnet flange that have different rear side openings and two insert types with inside or outside chamber valve seat.

Valve body material options are aluminum, hard anodized or nickel-plated and stainless steel. Gate and bonnet seals are in FKM or FFKM with other sealing materials available on request.


Key features of the 05.3 HV-Transfer-Insert with L- Motion

Features:

  • Reliable operation in corrosive process conditions
  • L-Motion technology to avoid particle generation and activation
  • Compression bar for even gate pressure distribution
  • Bellows sealed shaft feedthrough
  • Extended maintenance free-cycle
  • Smooth, low-shock movement

Benefits:

  • High uptime / unrestricted performance
  • Fast operation
  • Low cost of operations
Technical data
Sizes   50 x 336 mm to 80 x 500 mm (1.97" x 13.23" to 3.15" x 19.69")
Actuator Pneumatic Double acting with position indicator
Body Material   Blank or Hard anodized Aluminium
Feedthrough   Bellows
Leak Rate   Varies depending on material
Pressure Range Blank or nickel-prated aluminium 1 × 10-9 mbar to 1.1 bar (abs)
  Hard anodized aluminium 1 × 10-6 mbar to 1.1 bar (abs)
Differential Pressure On the Gate 1.1 bar
  At Opening ≤ 30 mbar
Cycles until first Service   ≥ 3 Million
Temperature Valve Body, Gate ≤ 120 °C
  Actuator ≤ 80 °C
Heating and Cooling Rate   ≤ 40 °C h-1
Material Valve Body, Gate, Service Cover EN AW-5083 (3.3547), EN AW-6061 (3.3211), EN AW-6082 (3.2315)
  Bellows end pieces, shaft AISI 316L (1.4404)
  Bellows AISI 633 (AM 350)
Seal Gate, Service Cover FKM (Viton®)
Mounting Position   Actuator up or down
Impulse Solenoid Valve   24 VDC, 2.5 W (others on request)
Position Indicator: Contact Rating Voltage ≤ 50 V AC/DC
  Current ≤ 0.1 A ≤ 5 mA
  Connection 9 pin subminiature D
Compressed Air Connection   Quick connector O.D. 6 mm

 

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