62.7 Gas Dosing Valve

Article number

62714-XE64-ABG3

1 × 10^-8 mbar to 2 bar (abs)

Outstanding Controllability of Gas Flows for Vacuum Chambers

Size

DN 5 (1/5")

Flange

Specific

Material

Stainless steel

Actuator

Electromagnetic

Position Indication Signal

Pressure Min.

1 × 10^-⁸ mbar

Pressure Max.

2.0 bar (abs)

Flow range

100 sccm

Differential Pressure on Plate

≤ 1.1 bar

Max. temperature valve body

≤ 80 °C

Weight

96 g / 0.211 lbs

Power consumption

2.5 W

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