Reliable and Precise Control for Ultra-High Vacuum Processes

The 64.8 UHV Control Gate Valve series is designed for reliable, precise control and isolation in ultra-high vacuum processes in applications like sputtering or EUV in semiconductor production. It addresses the standard requirements of durability, modularity, leak tightness and serviceability with a special focus on high uptime and low cost of ownership.

The 64.8 is equipped with VATLOCK technology, which provides reliable sealing without any friction at the plate. The plate acts as a throttling element and varies the conductance of the valve opening. The onboard pressure controller calculates the required plate position to achieve the set point pressure. A stepper motor performs the actuation. An encoder monitors the plate position. This ensures a fast and accurate process pressure control. The special VATLOCK login mechanism in the close position guaranties leak tight isolation combined with failsafe closing in case of power loss.

Ultra-high vacuum performance is reached through metal bonnet sealing and a bellows sealed feedthrough as well as a vulcanized plate seal (O-ring as an option).

Already installed in thousands of demanding applications under various process conditions, the 64.8 has proven its outstanding reliability. With its robust, lubricant-free design, it meets all of the requirements for a high cycle vacuum control gate valve.


Closed
Open

The 64.8 UHV Control Gate Valve is available in different design options in sealing material, flange connections, ports for roughing (by-pass), venting or gauges as well as special control algorithms (adaptive, fix PI down-stream/soft-pump) to simplify its integration into various vacuum applications. The controller can also be mounted separately from the valve.

The series is available in sizes from DN 200 - 250mm (8” - 10”).


Key features of the 64.8 UHV Control Gate Valve

Features:

  • Reliable, proven design for UHV
  • Lubricant free
  • VATLOCK technology
  • Robust stainless steel body

Benefits:

  • Reliable and precise control and isolation
  • Extended maintenance free cycle
  • Low cost of ownership
Technical data
Sizes   DN 160 (6"), DN 200 (8"), DN 250 (10")
Actuator   Integrated pressure controller with cloed loop-controlled stepper motor
Body Material   Stainless Steel
Feedthrough   Bellows
Standard Flanges   ISO-F, CF-F, ASA-LP/ASA, JIS
Leak Rate Valve Body < 5 × 10-10 mbar ls-1
  Valve Seat < 1 × 10-9 mbar ls-1
Pressure Range DN 160– 200
DN 250
1 × 10-10 mbar to 1.6 bar (abs)
1 × 10-10 mbar to 1.2 bar (abs)
Differential Pressure on the Gate DN 160– 200
DN 250
≤ 1.6 bar
≤ 1.2 bar
Differential Pressure at Opening   ≤ 30 mbar
Cycles until first Service Throttling (open –max. open)
Isolation (open – close – open)
100 000
30 000
Temperature Valve Body ≤ 80°C
  Controller max. 50°C (≤ 35 °C recommended)
Material Valve Body AISI 304 (1.4301)
  Mechanism AISI 316L (1.4404) (DN 160– 200)
AISI 304 (1.4301) (DN 250)
  Bellows AISI 316L (1.4404, 1.4435)
Seal Bonnet Metal
  Gate FKM (Viton®)
Mounting Position   Any
Valve Position Indication   Visual (Mechanical and on Controller)

 

Customized Solution

Specify your customized solution.

If you have your specification already at hand, please upload it and submit it to us. We are happy to send you a quote.