Reliable Under All Conditions

The 02.4 Large Transfer Valve with MONOVAT has been developed to meet in particular the special requirements of vapor deposition system for organic material under high vacuum conditions. Designed for high cycle production systems the 02.4 combines an outstanding fast motion time with resistance against process-related deposits that would limit standard valve performance. The 02.4 is laid out for an uninterrupted performance of 1 million cycles before the first recommended service check.

As high uptime and reliable performance are the hallmark of the 02.4, maintenance requirements have been kept to a minimum. The special MONOVAT sealing technology used by the 02.4 allows a shock-free opening and closing movement of the gate minimizing particle activation and reducing seal wear. Furthermore, the very compact design of the sealing mechanism also makes the whole valve very compact providing small mounting dimensions.

Operating already in hundredths of display and PV production systems around the world under various process conditions, the 02.4 series has proven its outstanding performance in all aspects.


The 02.4 Large Transfer Valve with MONOVAT is tailored to exact customer specification like all VAT transfer valve solutions. Elements of these customization are a solenoid valve for impulse actuation, special surface treatments like hard anodized or nickel-plated aluminum, other sealing materials, grounding of gate and more.


Key features of the 02.4 Large Transfer Valve with MONOVAT

Features:

  • Compact design and small mounting dimensions
  • Shock-free gate movement
  • Resistance against process-related deposits

Benefits:

  • Low cost of operation
  • Fast cycle times
  • High uptime, low maintenance
Technical data
Sizes   Standard: 50× 500 mm to 150× 1600 mm (1.97" × 19.69" to 5.91" × 62.99")
Special sizes on request
Actuator Pneumatic Double Acting
Body Material   Aluminum
Feedthrough   Shaft Feedthrough with intermediate pumping
Leak Rate Valve Body, Valve Seat < 1 × 10-9 mbar ls-1
Differential Pressure on the Gate In closing/opening Direction ≤ 1 bar
Differential Pressure at Opening   ≤ 5 mbar
Cycles until first service   1 Million
Closing or Opening Time   ≤ 1.5 s (with 100 mm opening height)
Temperature Valve Body, Gate
Actuator, Position Indicator
≤ 120°C
≤ 60°C
Temperature Difference Body/Gate Small Sizes
Large Sizes
≤ 40°C
≤ 25°C
Material Valve Body, Gate
Actuator Shafts
Differential Pressure Tabs
EN AW-5083 (3.3547)
AISI 304 (1.4301) hard-chrome plated
AISI 304 (1.4301)
Seal Gate, Flanges, Feedthrough FKM (Viton®)
Mounting Position   Actuator Up, Down or Lateral
Position Indicator Voltage 10– 30 VDC PNP (NPN optional)

 

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Customized Solution

Specify your customized solution.

If you have your specification already at hand, please upload it and submit it to us. We are happy to send you a quote.