Maximize Quality and Productivity
with Outstanding Particle Performance

Particle performance in terms of a low degree of particle activation and particle emission as well as fast, reliable opening and closing cycles are the key performance indicators for atmospheric transfer doors in semiconductor production systems.

The new 07.0 HV Transfer Door Insert with LINVAT combines both exceptional particle performance with optimized controllability for adjustable, fast cycle times.


Closed
Optically closed
Open

The design of the 07.0 HV Transfer Door Insert with LINVAT technology focusses on optimized particle performance and high speed cycle times.

An outstanding level of particle performance is achieved by optimization of various design features like a torsion bar on the plate for uniform seal compression, a fully encapsulated actuator, a lubrication free environment and a real L-Motion with an adjustable speed profile to avoid any closing shock.

The exceptional real L-Motion with an adjustable speed profile of the 07.0 is achieved by VAT’s special LINVAT technology. Instead of two separate actuators for the vertical and horizontal movement of the L-Motion, LINVAT achieves this with only one actuator in a twostep motion. The result: a highly reliable actuators concept with a fast, stable, adjustable and shock free movement. The benefit: Higher uptime and improved controllability.


Key features of the 07.0 HV Transfer Door Insert with LINVAT

Features:

  • Improved particle performance design
  • Grease-free operation environment
  • Exceptional precise L-Motion
  • Uniform seal compression
  • Flexible D-sub and AMP connection

Benefits:

  • Outstanding particle performance
  • High uptime
  • Reliable operation
Technical data
Sizes   up to 50 × 420 mm (1.97" × 16.54")
Actuator   Pneumatic
Feedthrough   Bellows
Leak Rate   < 1 × 10-7 mbar ls-1
Differential Pressure on the Gate in closing direction ≤ 1 bar
  in opening direction ≤ 0.1 bar
Differential Pressure during opening   ≤ 30 mbar
Cycles until first Service   ≥ 3 million
Actuation Time Opening ≤ 1 s
  Closing ≤ 1 s
Temperature at Gate ≤ 120 °C
  at Actuator ≤ 80 °C
Material Gate Aluminium
  Bellows Protection Polytetrafluoroethylene
Seal   Perfluoroelastomeric, vulcanized
Mounting Position   Actuator up or down
Locking in case of pressurized air failure   Pneumatic locking
Position Indicator   Reed Swith
Weight   approx 6.0 kg

 

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