Sub-fab processes can be challenging: corrosive, abrasive, and toxic gases and/or condensation and high levels of by-products in the gas stream can al...
The main requirement of a modern shut-off valve is its reliable and fast acting emergency isolation on any backflow event. The 25.7 is designed to provide a sensitive, high-speed isolation function that reliably prevents the risk of backflow into a process chamber or pipe system.
The 25.7 HV Quick Shut-Off Valve is flow controlled. The direct operating design without any subsystem (sensor and actuator) provides high-speed isolation with low complexity and low failure risk. With less than 10 milliseconds from the initial backflow impulse to full isolation the 25.7 leads its class.
As a safety solution, a shut-off valve should ideally add no conductance barrier to the system. The 25.7’s special flow-optimized design sets the standard in this regard, delivering a perfect balance between high conductance and fast isolation.
When used in processes with by-products in the gas stream, e.g. foreline applications, any accumulation of contamination on a quick shut-off valve reduces conductance and can negatively influence its isolation capabilities. This process related challenge is adressed by a special surface coating which minimizes accumulation for most by-products significantly. An additional heating option is available to avoid process gas condensation at the valve surface.
The 25.7 HV Quick Shut-Off Valve is available in sizes from DN 50 - 160mm (2“ - 6”). The valve body is made of stainless steel. The standard flange is ISO-K for DN63 to DN160 (2½ “ - 6”) and ISO-KF for DN50 (2“).
For applications with very aggressive process gases, FFKM seals are available.
|Sizes||DN 100 (4")|
|Body Material||Stainless Steel|
|Leak Rate||Valve Body||< 1 × 10-9 mbar ls-1|
|Valve Seat||< 1 × 10-6 mbar ls-1|
|Pressure Range||Vacuum to 1.2 bar (abs)|
|Differential Pressure||On the Gate||≤ 1 bar|
|Cycles until first Service||recommended after each backflow event
or with regular maintenance cycles
|Temperature||Valve Body||≤ 200 °C|
|Heating and Cooling Rate||≤ 50 °C h-1|
|Material||Valve Body||AISI 304 (1.4301)|
|Plate||AISI 304 (1.4301)|
|Mounting Position||Fore line installation vertical only
plate facing chamber
|Trigger Pressure||at the Gate||≥ 5 mbar|
|Closing Time||Plate Move Time||≤ 10 ms|
|Weight||3.7 kg / 8.16 lbs|