Outstandingly High Conductance Spectrum

The 65.5 HV Pendulum Control Valve provides an outstandingly high, controllable conductance spectrum. A key feature is also its exceptionally low particle count and low particle activation level due to its smooth open and close movement.

The valve was specifically designed for harsh processes such as corrosive etching and cleaning applications in semiconductor production processes where a highly controllable conductance spectrum is required with low initial controllable conductance.

The 65.5 is provided in DN 250mm (10”) and controls down to minimum conductance of only 2 l s-1. Increases in conductance can be controlled to a very fine degree due to the data processing capabilities of the 32-bit actuator controller. It also provides faster actuation, as sensor and control commands are processed faster  than an equivalent 16-bit controller. Various standard port connectors on the controller provide easy access via PC or a connection to a process control unit.

The pendulum gate mechanism has been designed to very robust to ensure that it resists any process by-products. To reduce seal wear and avoid particle generation as well as particle activation, the open and close movement is divided. The first degree of conductance is achieved by a vertical movement away from the gate seat and later increases in conductance is achieved by moving the pendulum gate in a horizontal movement. Due to the fine controllability of the gate movement the preset movement sequence can be adjusted to process requirements very pecise. To secure leaktight closing the gate is pressed to the gate seat with a special, patented pressure bar. This ensures an even sealing pressure in all areas of the gate.

With a compact design and direct mounting option as well as a variety of other design options, the 65.5 series is easy to integrate into various vacuum processes.


The 65.5 HV Pendulum Control Valve is available in blank or hard anodized aluminum with standard flange connectors in ISO-F and JIS. Customer-specific flanges can be integrated as well as a heater for valve operating temperatures of up to 120°C.

1. Gate
2. Actuator shaft
3. Two-axis actuator
4. Actuator feedthrough seal
5. Gate seal


Key features of the 65.5 HV Pendulum Control Valve

Features:

  • Reliable isolation in harsh process environments
  • Low shock operation, low particle activation
  • Process inert – very low residual out gassing (RGA)
  • Fast, adjustable operation
  • On-board pressure controller
  • Just one electrical power source required with optional sensor power supply

Benefits:

  • Exceptional pressure control performance
  • Fast, virtually particle-free operation
  • Adjustable to process requirements

Technical data
Sizes   DN 250 (10")
Actuator   Integrated pressure controller with servo drive
Body Material   Aluminium blank or hard anodized
Feedthrough   Rotary Feedthrough
Standard Flanges   ISO-F, JIS
Leak Rate Valve Body Blank aluminium
Hard anodized aluminium
< 1 × 10-9 mbar ls-1
< 1 × 10-5 mbar ls-1
Leak Rate Valve Seat Blank aluminium
Hard anodized aluminium
< 1 × 10-9 mbar ls-1
< 1 × 10-4 mbar ls-1
Pressure Range Blank aluminium
Hard anodized aluminium
1 × 10-8 mbar to 1.2 bar (abs)
1 × 10-6 mbar to 1.2 bar (abs)
Cycles until first Service Pressure Control
Closing / Opening
2 Million
50 000
Temperature Valve Body ≤ 120 °C 
  Controller max. 50 °C (≤ 35 °C recommended)
Material Valve Body, Plate EN AW-6061 (3.2311) T651
  Other Parts AISI 316L (1.4404, 1.4435)
  Connection screw at plate SST A4-80, Ni-PTFE, coated
Seal Bonnet, Plate Body Feedthrough FKM (Viton®)
Mounting Position   Any

 

Customized Solution

Specify your customized solution.

If you have your specification already at hand, please upload it and submit it to us. We are happy to send you a quote.