For Maximized Productivity

The 65.3 HV Pendulum Control Valve sets new standards in downstream pressure control and isolation. Designed specifically for semiconductor and display production systems, it offers the highest level of controllability over a wide conductance range. The 65.3 offers improved function through its electric motor with integrated position control. The drive controller provides a new level of controllability through its higher 32-bit data processing capacity. Each position of the pendulum gate can thus be controlled very quickly, finely and very precisely. This allows very precise downstream pressure control with a very short response time. The preset movement sequence of the valve can be adapted in speed and course to individual and changing process parameters.

The 65.3 HV Pendulum Control Valve also impresses with its outstanding properties in preventing particle release. An optimized, damped closing movement of the gate avoids any shocks and vibrations that are common with conventional valves. The 65.3 closes so smoothly that closing and opening is almost imperceptible. The extremely precise mechanical guidance of the gate guarantees contact-free gas flow control in the reciprocating motion and a uniform hermetic seal in all areas in the sealing motion.   

Already installed in hundreds of demanding applications under various process conditions, the 65.3 HV Pendulum Control Valve has proven its outstanding reliability and performance. The 65.3 is also ideal for retrofitting existing systems.  


Closed
Control position
Open
Optically closed
Leak-tight closed

The 65.3 HV Pendulum Control Valve is available in sizes DN 100 - 350 mm (4" - 14") in blank or hard anodized aluminum, with standard flange connections in ISO-F and JIS. Customized flanges can also be integrated, as well as a direct mounting option. Standard sealing material is FKM, other materials on request. Special control algorithms (adaptive, fixed PID, upstream, soft pump) are available for the controller. Various standard ports on the controller allow easy access via a PC or connection to a process control unit (PCU). A dedicated Control Performance Analyzer (CPA) software allows easy calibration of the 65.3 as well as simplified maintenance planning.


The Key Features of 65.3 HV Pendulum Control Valve

Features:

  • Fast and precise holding pressure control
  • Shock-free operation: No particle activation
  • Increased process stability: All flows and pressures are controlled
  • Integrated 32-bit pressure regulator (IC2) with Control Performance Analyzer (CPA)
  • "Plug and play" retrofit: No undocking or alignment required

Benefits:

  • Outstanding reliability, precision and speed
  • Extended maintenance cycle
  • Low operating costs
Technical data
Sizes   DN 100 (4"), DN 160 (6"), DN 200 (8"),
DN 250 (10"), DN 320 (12"), DN 350 (14")
Actuator   Stepper motor with integrated pressure controller
Body Material   Aluminium blank or hard anodized
Feedthrough Actuator
Sealing Ring
Rotary Feedthrough
Shaft Feedthrough
Standard Flanges   ISO-F, JIS
Leak Rate Valve Body Blank aluminium
Hard anodized aluminium
< 1 × 10-9 mbar ls-1
< 1 × 10-5 mbar ls-1
Leak Rate Valve Seat Blank aluminium
Hard anodized aluminium
< 1 × 10-9 mbar ls-1
< 1 × 10-4 mbar ls-1
Pressure Range Blank aluminium
Hard anodized aluminium
1 × 10-8 mbar to 1.2 bar (abs)
1 × 10-6 mbar to 1.2 bar (abs)
Cycles until first Service Pressure Control
Closing / Opening
1 Million
200 000
Temperature Valve Body ≤ 120 °C 
  Controller max. 50 °C (≤ 35 °C recommended)
Material Valve Body, Plate EN AW-6061 (3.3211)
  Sealing Ring EN AW-6061 (3.3211), AISI 305 (1.4303),
AISI 420C (1.3541), AISI 631 (1.4568)
  Other Parts AISI 316L (1.4404, 1.4435), AISI 440 (1.4122),
AISI 301 (1.4310), AISI 316 Ti (1.4571), AISI 304 (1.4301)
Seal Bonnet, Plate Body Feedthrough FKM (Fluoroelastomer)
Mounting Position   Any

 

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