<< Click to Display Table of Contents >> Execute a learn procedure |
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1.Set specific gas flow according to calculation (Gasflow calculation for Learn) or select Calculate button in CPA Adaptive Learn window:
Learn does not need to be performed with the process gas. Instead N2 or Ar may be used.
2.Set parameter Bank Selection, if only one learn is used take Bank 1. Be sure that the pressure controller also selects this learn bank!
3.Reduce Open Speed if it is critical for the chamber if the pressure drops rapidly when the valve is opened.
4.Set a Pressure Limit [SFS] limit if sensor full scale cannot or should not be reached.
5.Set parameter Control Mode to Learn or press Start Learn button in CPA Adaptive Learn window.
6.Wait until the Control Mode leaves the Learn state which means the Learn procedure is finished or wait until progress bar is continue in CPA Adaptive Learn window.
7.Check if the learn was successful by checking if Status shows value 2 (=Completed Successfully). In best case Warning Info shows no warning.
➔Sensor signal must not shift during LEARN. Wait until sensor signal is stable before LEARN is performed. Learn may take several minutes. ➔Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. ➔The PID controller covers 5% to 5000% of the gas flow which was used for learn. |