Gas flow and leak rate

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Gas flow and leak rate

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Pa m3 s

mbar ls

Torr ls

atm cm3 s

lusec

sccm

slm

Mol s-1

Pa m3 s-1

1

10

7.5

9.87

7.5·103

592

0.592

4.41·10-4

mbar ls-1

0.1

1

0.75

0.987

750

59.2

5.92·10-2

4.41·10-5

Torr ls-1

0.133

1.33

1

1.32

1000

78.9

7.89·10-2

5.85·10-5

atm cm3 s-1

0.101

1.01

0.76

1

760

60

6·10-2

4.45·10-5

lusec

1.33·10-4

1.33·10-3

10-3

1.32·10-3

1

7.89·10-2

7.89·10-5

5.86·10-8

sccm

1.69·10-3

1.69·10-2

1.27·10-2

1.67·10-2

12.7

1

10-3

7.45·10-7

slm

1.69

16.9

12.7

16.7

1.27·104

1000

1

7.45·10-4

Mol s-1

2.27·103

2.27·104

1.7·104

2.24·104

1.7·107

1.34·106

1.34·103

1