PKW parameter list

<< Click to Display Table of Contents >>

Navigation:  »No topics above this level«

PKW parameter list

Return to chapter overview

Number [HEX]

Name

Index [HEX]

Data Type

Min

Max

Default

Access

Non Volatile

Unit

Notes

E6

 

SENSOR OPERATION MODE

 

 

 

0

 

 

 

UINT8

 

 

 

0

 

 

 

4

 

 

 

1

 

 

 

RW

 

 

 

1


Pressure source for pressure control

0 = no sensor

1 = sensor 1

2 = both sensors (sensor 1 high, sensor 2 low)

3 = sensor 2

4 = both sensors (sensor 2 high, sensor 1 low)

E7

SENSOR FULL SCALE RATIO

0

FLOAT32

1.0

1000.0

10.0

RW

1


Full scale ratio between high sensor and low sensor

Refer to chapter: «Valve and sensor configuration»

F4

SENSOR 1 FULL SCALE

0

FLOAT32

1.0E-6

1.0E+6

1000.0

RW

1


Full scale value of sensor 1

 

F5

 

 

SENSOR 1 UNIT

 

 

0

 

 

UINT8

 

 

0

 

 

8

 

 

4

 

 

RW

 

 

1


Pressure unit of SENSOR 1 FULL SCALE

0 = Pa        1 = bar        2 = mbar

3 = ubar        4 = Torr        5 = mTorr

6 = atm        7 = psi        8 = psf

FA

SENSOR 1 OFFSET VALUE

(Sensor offset value (Sensor Adjust, Zero))

0

FLOAT32

-1.4

1.4

0

RW

1


Voltage value in [Volt]

FE

SENSOR 1 RAW VALUE (ADC measurement value on the sensor input)

0

FLOAT32

-

-

-

RO

0


Voltage value in [Volt]

104

SENSOR 2 FULL SCALE

0

FLOAT32

1.0E-6

1.0E+6

100.0

RW

1


Full scale value of sensor 2

 

 

105

 

 

SENSOR 2 UNIT

 

 

0

 

 

UINT8

 

 

0

 

 

8

 

 

4

 

 

RW

 

 

1


Pressure unit of SENSOR 2 FULL SCALE

0 = Pa        1 = bar        2 = mbar

3 = ubar        4 = Torr        5 = mTorr

6 = atm        7 = psi        8 = psf

10A

SENSOR 2 OFFSET VALUE

(Sensor offset value (Sensor Adjust, Zero))

0

FLOAT32

-1.4

1.4

0

RW

1


Voltage value in [Volt]

10E

SENSOR 2 RAW VALUE

(ADC measurement value on the sensor input)

0

FLOAT32

-

-

-

RO

0


Voltage value in [Volt]

116

 

LEARN METHOD

 

0

 

UINT8

 

0

 

2

 

0

 

RW

 

0


0 = standard

1 = short

2 = calculated

117

 

LEARN OPEN SPEED

 

0

 

UINT16

 

1

 

1000

 

1000

 

RW

 

1


Open speed during learn process

1: lowest speed

1000: full speed

118

LEARN PRESSURE MAXIMUM

0

UINT16

0

1000

1000

RW

0


Pressure limit during learn process.

In ‰ of sensor full scale (high range sensor)

119

LEARN STATE

0

UINT16

0x0000

0xFFFF

0x0000

RO

0


Warnings. See table below

122

LEARN CHAMBER VOLUME

0

FLOAT32

0.1

1.0E+6

50.0

RW

1

liter

For short and calculated learn

123

LEARN PUMPING SPEED

0

FLOAT32

0.1

1.0E+5

1.0

RW

0

liter/sec

Output of short learn

Input for calculated learn

124

LEARN GAS FLOW VALUE

0

FLOAT32

1.0 E-9

1.0 E+9

100.0

RW

0


For short learn

 

 

 

 

 

125

 

 

 

 

 

LEARN GAS FLOW UNIT

 

 

 

 

 

0

 

 

 

 

 

UINT8

 

 

 

 

 

0

 

 

 

 

 

7

 

 

 

 

 

5

 

 

 

 

 

RW

 

 

 

 

 

0


Unit of LEARN GAS FLOW VALUE

0 = pa m3 s-1
1 = mbar l s-1
2 = Torr l s-1

3 = Atm cm3 s-1

4 = luesec

5 = sccm

6 = slm

7 = mol s-1

 

190

VALVE SPEED

 

0

 

UINT16

 

1

 

1000

 

1000

 

RW

 

1


Valve speed during position and pressure control

1: lowest speed

1000: full speed

 

 

199

 

 

PRESSURE CONTROL ALGORITHM

 

 

0

 

 

UINT8

 

 

0

 

 

3

 

 

0

 

 

RW

 

0


0 = adaptive downstream

1 = fixed 1

2 = fixed 2

3 = soft pump

Refer to pressure control configuration

19A

SENSOR DELAY (ADAPTIVE DOWNSTREAM)

0

FLOAT32

0.0

1.0

0.0

RW

0

sec


19B

RAMP TIME (ADAPTIVE DOWNSTREAM)

0

FLOAT32

0.0

1.0E+6

0.0

RW

0

sec


19C

RAMP TIME MODE (ADAPTIVE DOWNSTREAM)

0

UINT8

0

1

0

RW

0


0 = time from actual pressure to target pressure.

1 = time from 0 to SFS (constant slope)

19E

GAIN FACTOR (ADAPTIVE DOWNSTREAM)

0

FLOAT32

0.0001

7.5

1.0

RW

0



19F

RAMP TYPE (ADAPTIVE DOWNSTREAM)

0

UINT8

0

1

0

RW

0


0 = linear,

1 = logarithmic

1A5

RAMP TIME (FIXED 1)

0

FLOAT32

0.0

1.0E+6

0.0

RW

0

sec


1A6

RAMP TIME MODE (FIXED 1)

0

UINT8

0

1

0

RW

0


0 = time from actual pressure to target pressure.

1 = time from 0 to SFS (constant slope)

1A7

CONTROL DIRECTION (FIXED 1)

0

UINT8

0

1

0

RW

0


0 = downstream, 1 = upstream

1A8

P-GAIN (FIXED 1)

0

FLOAT32

0.001

100.0

0.1

RW

0



1A9

I-GAIN (FIXED 1)

0

FLOAT32

0.0

100.0

0.1

RW

0



1AA

RAMP TYPE (FIXED 1)

0

UINT8

0

1

0

RW

0


0 = linear, 1 = logarithmic

1AF

RAMP TIME (FIXED 2)

0

FLOAT32

0

1.0E+6

0.0

RW

0

sec


1B0

RAMP TIME MODE (FIXED 2)

0

UINT8

0

1

0

RW

0


0 = time from actual pressure to target pressure.

1 = time from 0 to SFS (constant slope)

1B1

CONTROL DIRECTION (FIXED 2)

0

UINT8

0

1

0

RW

0


0 = downstream, 1 = upstream

1B2

P-GAIN (FIXED 2)

0

FLOAT32

0.001

100.0

0.1

RW

0



1B3

I-GAIN (FIXED 2)

0

FLOAT32

0.0

100.0

0.1

RW

0



1B4

RAMP TYPE (FIXED 2)

0

UINT8

0

1

0

RW

0


0 = linear, 1 = logarithmic

1B9

RAMP TIME (SOFT PUMP)

0

FLOAT32

0.0

1.0E+6

0.0

RW

0

sec


1BA

RAMP TIME MODE (SOFT PUMP)

0

UINT8

0

1

0

RW

0


0 = time from actual pressure to target pressure.

1 = time from 0 to SFS (constant slope)

1BC

P-GAIN (SOFT PUMP)

0

FLOAT32

0.001

100.0

0.1

RW

0



1BD

I-GAIN (SOFT PUMP)

0

FLOAT32

0.0

100.0

0.1

RW

0



1BE

RAMP TYPE (SOFT PUMP)

0

UINT8

0

1

0

RW

0


0 = linear, 1 = logarithmic

258

RESET VALVE

0

UINT8

0

1

0

RW

0


1 = reset

25D

RESET SERVICE REQUEST FLAG

0

UINT8

0

1

0

RW

0


1 = reset

26C

CONTROLLER FIRMWARE VERSION

0

STRING




RO

1



280

FIELDBUS ADDRESS

0

UINT32

0

255

0

RW

1



290

TIME SINCE POWER ON

0

UINT32

0

232 - 1

0

RO

0

sec


291

TOTAL TIME POWERED

0

UINT32

0

232 - 1

0

RO

1

sec


36B0

PLASMA MODE DURATION

0

FLOAT32

0.01

30.0

1.5

RW

1

sec


36B1

PLASMA MODE FILTER TIME

0

FLOAT32

0.01

30.0

4.0

RW

1

sec


Setting of ‘Non volatile’ for control parameter is settable by s:02Z10x. It can be read out by "i:02Z10"

FLOAT32 is in IEE754 Format