IC1

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Note:

All position and pressure values are integer values and they are scalable.

Default range pressure 0 … 1000000, position 0 … 100000

 

System

Set

Resp

Get

Resp

Data

Set, Get Resp

Description

c:01

c:01

 

 

aa

Access Mode: 0=Local, 1=Remote, 2=Locked

 

 

i:80

i:80

abcdefgh

Hardware Configuration

a

Power Failure Option: 0=no, 1=yes

b

Sensor Power Supply: 0=no, 1=yes

c

Interface Type:

2=RS232, 3=RS323 with AO, 8=RS232/RS485, 9=RS232/485 with AO

d

Sensor Inputs: 0, 1 or 2

e

Cluster Option: 0=no, 1=yes

f

External Isolation Valve: 0=no, 1=yes

g

Reserved

h

Small Size Controller: 0=no, 1=yes

 

 

i:82

i:82

string

Firmware

 

 

i:83

i:83

string

Serial Number

 

 

i:30

i:30

abcdeeef

Device Status

a

Access Mode: 0=Local, 1=Remote, 2=Locked

b

Control Mode: 0=Init,1=Homing,2=Position,3=Close,4=Open,5=Pressure Control,6=Hold,7=Learn,8=Interlock Open,9=Interlock Close,12=Power Failure,13=Safety,14=Error

c

PFO Disabled: 0=no, 1=yes

d

Warning Present: (in i:51 or i:52) 0=no, 1=yes

e

Reserved

f

Sensor Simulation Active: 0=no, 1=yes

 

 

i:76

i:76

aaaaaa

bbbbbbbbcde

Compound

a

Pressure

b

Position

c

Access Mode: 0=Local, 1=Remote, 2=Locked

d

Control Mode: 0=Init,1=Homing,2=Position,3=Close,4=Open,5=Pressure Control,6=Hold,7=Learn,8=Interlock Open,9=Interlock Close,12=Power Failure,13=Safety,14=Error

e

Warning Present: (in i:51 or i:52) 0=no, 1=yes

s:04

s:04

i:04

i:04

abcdefgh

Valve Configuration

a

Homing End Position: 0=Close, 1=Open

b

Power Failure Position: 0=Close, 1=Open

c

External Isolation Valve Enable: 0=no, 1=yes

d

Control Stroke Limitation Enable: 0=no, 1=yes

e

Network Failure Position

f

Cluster Valve Offline

g

Homing Start: 0=Not Isolated or Move Command, 1=c:4303 Command, 2=Open Command, 3=Move Command, 4=At Power Up

h

Reserved

 

 

i:50

i:50

aaa

Fatal Error Number:

20=Limit Stop Not Detected, 21=Blocked, 22=Blocked, 40=Motor Driver

 

c:53

 

c:53

i:51

i:53

i:51

i:53

abcdefgh

Warnings 1

a

Service Request

b

Learn Data Warning

c

PFO not ready

d

Compressed Air Failure

e

Sensor Ratio

f

External Isolation Valve Warning

g

Cluster  Slave Offline

h

Network Failure

i:53 = nonvolatile, c :5300 = reset

 

c:54

 

c:54

i:52

i:54

i:52

i:54

abcdefgh

Warnings 2

a

Rom Memory

b

Interface

c

Sensor ADC

d

Interface ADC

e

Reserved

f

Sensor value not valid

g

Cluster  Slave Offline

h

Network Failure

i:54 = nonvolatile, c :5400 = reset

c:20

c:20

i:70

i:70

aaaaaaaaaa

Counter Control Cycles c:2000 = reset

c:21

c:21

i:71

i:71

aaaaaaaaaa

Counter Isolation Cycles c:2100 = reset

c:22

c:22

i:72

i:72

aaaaaaaaaa

Counter Power Up c:2200 = reset

c:10

c:10

 

 

aa

Power Failure Option Off: 0=Off (volatile), 1=On

c:82

c:82

 

 

aa

Reset: 1=Reset

 

 

 

 



Position Control

Set

Resp

Get

Resp

Data

Set, Get Resp

Description

 

 

A:

A:

aaaaaa

Actual Position

C:

C:

 

 


Close

O:

O:

 

 


Open

R:

R:

i:38

i:38

aaaaaaaa

Position Control, a Target Position

H:

H:

 

 


Hold

N:

N:

 

 


Position Mode (Release Hold)

V:

V:

i:68

i:68

aaaaaa

Speed: 0 - 1000

 

 

 

 



 

 

Pressure Control

Set

Resp

Get

Resp

Data

Set, Get Resp

Description

S:

S:

i:38

i:38

aaaaaaaa

Pressure Control, a Target Pressure

H:

H:

 

 


Hold

K:

K:

 

 


Pressure Control Mode (Release Hold)

s:02

s:02a

s:02

i:02

i:02a

i:02

 

 

abcdeeff

Pressure Control Setup

a

Controller: 0=Adaptive,1=PI Downstream,2=PI Upstream,3=Softpump

b

Gain Factor (Adaptive, not for this valve)

0=0.1,1=0.13,2=0.18,3=0.23,4=0.32,5=0.42,6=0.56,7=0.75,8=1.0,9=1.33,A=1.78,B=2.37,

C=3.16,D=4.22,E=5.62,F=7.5,G=0.0001,H=0.0003,I=0.001,J=0.003,K=0.01,L=0.02,M=0.05

c

Sensor Delay (Adaptive, not for this valve)

0=0,1=0.02,2=0.04,3=0.06,4=0.08,5=0.1,6=0.15,7=0.2,

8=0.25,9=0.3,A=0.35,B=0.4,C=0.5,D=0.6,E=0.8,F=1.0 sec

d

Ramp Time
0=0.0,1=0.5,2=1.0,3=1.5,4=2.0,5=2.5,6=3.0,7=3.5,8=4.0,9=4.5,A=5.0 sec

e

P-Gain (PI and Softpump)

0=0.001,1=0.0013,2=0.0018,3=0.0024,4=0.0032,5=0.0042,6=0.0056,

7=0.0075,8=0.01,9=0.013,10=0.018,11=0.024,12=0.032,13=0.042,

14=0.056,15=0.075,16=0.1,17=0.13,18=0.18,19=0.24,20=0.32,21=0.42,

22=0.56,23=0.75,24=1.0,25=1.3,26=1.8,27=2.4,28=3.2,29=4.2,30=5.6,

31=7.5,32=10,33=13,34=18,35=24,36=32,37=42,38=56,39=75,40=100

f

I-Gain (PI and Softpump): Same values as P-Gain

s:02a01

s:02

i:02a01

i:02

value

Ramp Time: 0.0 – 1000000.0sec, a = Controller: A,B,C,D

s:02a02

s:02

i:02a02

i:02

value

Ramp Mode: 0=constant time, 1=constant slope, a = Controller: A,B,C,D

s:02a03

s:02

i:02a03

i:02

value

Control Direction: 0=downstream, 1=upstream, a = Controller: A,B,C,D

s:02a04

s:02

i:02a04

i:02

value

P-Gain: 0.001 – 100.0 (Control Algorithm = PI or Softpump)

a = Controller: A,B,C,D

s:02a05

s:02

i:02a05

i:02

value

I-Gain: 0.001 – 100.0, a = Controller: A,B,C,D

s:02a06

s:02

i:02a06

i:02

value

Ramp Type: 0=linear, 1=logarithmic, 2=exponential, a = Controller: A,B,C,D

s:02a10

s:02

i:02a10

i:02

value

Control Algorithm: 0=Adaptive, 1=PI, 2=Softpump, a = Controller: A,B,C,D

s:02Z00

s:02

i:02Z00

i:02

value

Control Unit Selector: 0 .. 3

s:02Z10

s:02

i:02Z10

i:02

value

Save Volatile: 0=non volatile, 1=volatile

 

 

 

 



 

 

Pressure Reading

Set

Resp

Get

Resp

Data

Set, Get Resp

Description

 

 

P:

P:

aaaaaaaa

Actual Pressure

s:01

s:01

i:01

i:01

 

 

abcccccc

Setup

a Sensor Mode

0=No Sensor

1=Sensor1 Only

3=Sensor2 Only

2=Sensor1 High, Sensor2 Low, Crossover Soft Switch

4=Sensor2 High, Sensor1 Low, Crossover Soft Switch

5=Sensor1 High, Sensor2 Low, Crossover High Disabled

6=Sensor2 High, Sensor1 Low, Crossover High Disabled

7=Sensor1 High, Sensor2 Low, Crossover Target Pressure

8=Sensor2 High, Sensor1 Low, Crossover Target Pressure

9=Sensor1 High, Sensor2 Low, Crossover Hard Switch

10=Sensor2 High, Sensor1 Low, Crossover Hard Switch

b Zero Adjust Enable

0=disable, 1=enable

c Sensor Factor

 

Ratio between the sensors * 100

Example: Sensor 1=1Torr, Sensor 2=100mTorr à c = 010000

Z:

Z:

 

 


Zero

 

 

i:60

i:60

aaaaaaaa

Offset Sensor 1

 

 

i:61

i:61

aaaaaaaa

Offset Sensor 2

 

 

i:62

i:62

aaaabbbb

Offsets: a Sensor 1, b Sensor 2, range -140 … +150 of 1000

 

 

i:62

i:62

aaaaaaaa

Pressure Sensor 1

 

 

i:63

i:63

aaaaaaaa

Pressure Sensor 2

c:6002

c:60

 

 

aaaaaaaa

Pressure Alignment, a = Alignment pressure

c:6102

c:61

 

 

aaaaaaaa

Pressure Alignment, a = Alignment pressure

c:90

c:90

 

 

aa

Pressure Simulation, 0=Off, 1=On

 

 

 

 



 

Interface

Set

Resp

Get

Resp

Data

Set, Get Resp

Description

s:20

s:20

i:20

i:20

abcdefgh

Setup1

a

Baud Rate:

0=600,1=1200,2=2400,3=4800,4=9600,5=19200,6=38400,7=57600,8=115200,9=230400

b

Parity Bit: 0=Even, 1=Odd, 2=Mark, 3=Space

c

Data Length: 0=7bit, 1=8bit

d

Stop Bit: 0=1bit, 1=2bit

e

Command Set: 0=IC, 1=PM

f

Digital Input 1: 0=Interlock Open, 1=Interlock Open Inverted, 2=Disabled

g

Digital Input 2: 0=Interlock Close, 1=Interlock Close Inverted, 2=Disabled

h

Second Answer (PM Command Set): 0=disabled, 1=enabled

s:21

s:21

i:21

i:21

abbbbbb

Setup2

a

Position Range: 0=1000, 1=10000, 2=100000

b

Pressure Range: 1000 .. 100000

s:22

s:22

i:22

i:22

abbbcdee

Setup3

a

Operation Mode: 0=RS232, 1=RS485, 2=RS485 Peer to Peer

b

Device Address: 0 … 999

c

Duplex Mode: 0=Full, 1=Half

d

Termination: 0=LF (CR/LF), 1=CR

e

Reserved

 

Errors

Description

Error message

Protocol

 

Parity error

E:000001

Input buffer overflow (to many characters)

E:000002

Framing error (data length, number of stop bits)

E:000003

Overrun (Service interface: Input buffer register overflow)

E:000004

Commands

 

<CR> or <LF> missing

E:000010

: missing

E:000011

Invalid number of characters (between : and )

E:000012

Invalid value

E:000023

Value out of range

E:000030

Hardware

 

Pressure mode, Zero or Learn without Sensor

E:000040

Command not applicable for hardware configuration

E:000041

Setup

 

ZERO disabled

E:000060

Device Status

 

Command not accepted due to local operation

E:000080

Command not accepted, Service Interface locked

E:000081

Command not accepted due to synchronization, CLOSED or OPEN by digital input, safety mode or fatal error

E:000082

Not accepted calibration and test mode

E:000089