<< Click to Display Table of Contents >> Choose correct control algorithm |
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System Configuration |
Constant gas flow available |
Constant gas flow not available |
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Tv*<= 500 sec |
Tv* > 500 sec |
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Adaptive |
PI |
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PI |
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Soft Pump |
Soft Pump |
* Use the formula below to define the applicable pressure control algorithm.
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qL gasflow for learn [mbarl/s] pSFS sensor full scale pressure [mbar] Tv* Vacuum time constant [sec] CV Chamber Volume [l] |