<< Click to Display Table of Contents >> PKW parameter list |
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Number [HEX] |
Name |
Index [HEX] |
Data Type |
Min |
Max |
Default |
Access |
Non Volatile |
Unit |
Notes |
E6 |
SENSOR OPERATION MODE |
0 |
UINT8 |
0 |
4 |
1 |
RW |
1 |
Pressure source for pressure control 0 = no sensor 1 = sensor 1 2 = both sensors (sensor 1 high, sensor 2 low) 3 = sensor 2 4 = both sensors (sensor 2 high, sensor 1 low) |
|
E7 |
SENSOR FULL SCALE RATIO |
0 |
FLOAT32 |
1.0 |
1000.0 |
10.0 |
RW |
1 |
Full scale ratio between high sensor and low sensor Refer to chapter: «Valve and sensor configuration» |
|
F4 |
SENSOR 1 FULL SCALE |
0 |
FLOAT32 |
1.0E-6 |
1.0E+6 |
1000.0 |
RW |
1 |
Full scale value of sensor 1 |
|
F5 |
SENSOR 1 UNIT |
0 |
UINT8 |
0 |
8 |
4 |
RW |
1 |
Pressure unit of SENSOR 1 FULL SCALE 0 = Pa 1 = bar 2 = mbar 3 = ubar 4 = Torr 5 = mTorr 6 = atm 7 = psi 8 = psf |
|
FA |
SENSOR 1 OFFSET VALUE (Sensor offset value (Sensor Adjust, Zero)) |
0 |
FLOAT32 |
-1.4 |
1.4 |
0 |
RW |
1 |
Voltage value in [Volt] |
|
FE |
SENSOR 1 RAW VALUE (ADC measurement value on the sensor input) |
0 |
FLOAT32 |
- |
- |
- |
RO |
0 |
Voltage value in [Volt] |
|
104 |
SENSOR 2 FULL SCALE |
0 |
FLOAT32 |
1.0E-6 |
1.0E+6 |
100.0 |
RW |
1 |
Full scale value of sensor 2 |
|
105 |
SENSOR 2 UNIT |
0 |
UINT8 |
0 |
8 |
4 |
RW |
1 |
Pressure unit of SENSOR 2 FULL SCALE 0 = Pa 1 = bar 2 = mbar 3 = ubar 4 = Torr 5 = mTorr 6 = atm 7 = psi 8 = psf |
|
10A |
SENSOR 2 OFFSET VALUE (Sensor offset value (Sensor Adjust, Zero)) |
0 |
FLOAT32 |
-1.4 |
1.4 |
0 |
RW |
1 |
Voltage value in [Volt] |
|
10E |
SENSOR 2 RAW VALUE (ADC measurement value on the sensor input) |
0 |
FLOAT32 |
- |
- |
- |
RO |
0 |
Voltage value in [Volt] |
|
116 |
LEARN METHOD |
0 |
UINT8 |
0 |
2 |
0 |
RW |
0 |
0 = standard 1 = short 2 = calculated |
|
117 |
LEARN OPEN SPEED |
0 |
UINT16 |
1 |
1000 |
1000 |
RW |
1 |
Open speed during learn process 1: lowest speed 1000: full speed |
|
118 |
LEARN PRESSURE MAXIMUM |
0 |
UINT16 |
0 |
1000 |
1000 |
RW |
0 |
Pressure limit during learn process. In ‰ of sensor full scale (high range sensor) |
|
119 |
LEARN STATE |
0 |
UINT16 |
0x0000 |
0xFFFF |
0x0000 |
RO |
0 |
Warnings. See table below |
|
122 |
LEARN CHAMBER VOLUME |
0 |
FLOAT32 |
0.1 |
1.0E+6 |
50.0 |
RW |
1 |
liter |
For short and calculated learn |
123 |
LEARN PUMPING SPEED |
0 |
FLOAT32 |
0.1 |
1.0E+5 |
1.0 |
RW |
0 |
liter/sec |
Output of short learn Input for calculated learn |
124 |
LEARN GAS FLOW VALUE |
0 |
FLOAT32 |
1.0 E-9 |
1.0 E+9 |
100.0 |
RW |
0 |
For short learn |
|
125 |
LEARN GAS FLOW UNIT |
0 |
UINT8 |
0 |
7 |
5 |
RW |
0 |
Unit of LEARN GAS FLOW VALUE 0 = pa m3 s-1 3 = Atm cm3 s-1 4 = luesec 5 = sccm 6 = slm 7 = mol s-1 |
|
190 |
VALVE SPEED |
0 |
UINT16 |
1 |
1000 |
1000 |
RW |
1 |
Valve speed during position and pressure control 1: lowest speed 1000: full speed |
|
199 |
PRESSURE CONTROL ALGORITHM |
0 |
UINT8 |
0 |
3 |
0 |
RW |
0 |
0 = adaptive downstream 1 = fixed 1 2 = fixed 2 3 = soft pump Refer to pressure control configuration |
|
19A |
SENSOR DELAY (ADAPTIVE DOWNSTREAM) |
0 |
FLOAT32 |
0.0 |
1.0 |
0.0 |
RW |
0 |
sec |
|
19B |
RAMP TIME (ADAPTIVE DOWNSTREAM) |
0 |
FLOAT32 |
0.0 |
1.0E+6 |
0.0 |
RW |
0 |
sec |
|
19C |
RAMP TIME MODE (ADAPTIVE DOWNSTREAM) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = time from actual pressure to target pressure. 1 = time from 0 to SFS (constant slope) |
|
19E |
GAIN FACTOR (ADAPTIVE DOWNSTREAM) |
0 |
FLOAT32 |
0.0001 |
7.5 |
1.0 |
RW |
0 |
||
19F |
RAMP TYPE (ADAPTIVE DOWNSTREAM) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = linear, 1 = logarithmic |
|
1A5 |
RAMP TIME (FIXED 1) |
0 |
FLOAT32 |
0.0 |
1.0E+6 |
0.0 |
RW |
0 |
sec |
|
1A6 |
RAMP TIME MODE (FIXED 1) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = time from actual pressure to target pressure. 1 = time from 0 to SFS (constant slope) |
|
1A7 |
CONTROL DIRECTION (FIXED 1) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = downstream, 1 = upstream |
|
1A8 |
P-GAIN (FIXED 1) |
0 |
FLOAT32 |
0.001 |
100.0 |
0.1 |
RW |
0 |
||
1A9 |
I-GAIN (FIXED 1) |
0 |
FLOAT32 |
0.0 |
100.0 |
0.1 |
RW |
0 |
||
1AA |
RAMP TYPE (FIXED 1) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = linear, 1 = logarithmic |
|
1AF |
RAMP TIME (FIXED 2) |
0 |
FLOAT32 |
0 |
1.0E+6 |
0.0 |
RW |
0 |
sec |
|
1B0 |
RAMP TIME MODE (FIXED 2) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = time from actual pressure to target pressure. 1 = time from 0 to SFS (constant slope) |
|
1B1 |
CONTROL DIRECTION (FIXED 2) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = downstream, 1 = upstream |
|
1B2 |
P-GAIN (FIXED 2) |
0 |
FLOAT32 |
0.001 |
100.0 |
0.1 |
RW |
0 |
||
1B3 |
I-GAIN (FIXED 2) |
0 |
FLOAT32 |
0.0 |
100.0 |
0.1 |
RW |
0 |
||
1B4 |
RAMP TYPE (FIXED 2) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = linear, 1 = logarithmic |
|
1B9 |
RAMP TIME (SOFT PUMP) |
0 |
FLOAT32 |
0.0 |
1.0E+6 |
0.0 |
RW |
0 |
sec |
|
1BA |
RAMP TIME MODE (SOFT PUMP) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = time from actual pressure to target pressure. 1 = time from 0 to SFS (constant slope) |
|
1BC |
P-GAIN (SOFT PUMP) |
0 |
FLOAT32 |
0.001 |
100.0 |
0.1 |
RW |
0 |
||
1BD |
I-GAIN (SOFT PUMP) |
0 |
FLOAT32 |
0.0 |
100.0 |
0.1 |
RW |
0 |
||
1BE |
RAMP TYPE (SOFT PUMP) |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
0 = linear, 1 = logarithmic |
|
258 |
RESET VALVE |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
1 = reset |
|
25D |
RESET SERVICE REQUEST FLAG |
0 |
UINT8 |
0 |
1 |
0 |
RW |
0 |
1 = reset |
|
26C |
CONTROLLER FIRMWARE VERSION |
0 |
STRING |
RO |
1 |
|||||
280 |
FIELDBUS ADDRESS |
0 |
UINT32 |
0 |
255 |
0 |
RW |
1 |
||
290 |
TIME SINCE POWER ON |
0 |
UINT32 |
0 |
232 - 1 |
0 |
RO |
0 |
sec |
|
291 |
TOTAL TIME POWERED |
0 |
UINT32 |
0 |
232 - 1 |
0 |
RO |
1 |
sec |
|
36B0 |
PLASMA MODE DURATION |
0 |
FLOAT32 |
0.01 |
30.0 |
1.5 |
RW |
1 |
sec |
|
36B1 |
PLASMA MODE FILTER TIME |
0 |
FLOAT32 |
0.01 |
30.0 |
4.0 |
RW |
1 |
sec |
Setting of ‘Non volatile’ for control parameter is settable by s:02Z10x. It can be read out by "i:02Z10"
FLOAT32 is in IEE754 Format