<< Click to Display Table of Contents >> Gas flow and leak rate |
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|
Pa m3 s |
mbar ls |
Torr ls |
atm cm3 s |
lusec |
sccm |
slm |
Mol s-1 |
Pa m3 s-1 |
1 |
10 |
7.5 |
9.87 |
7.5·103 |
592 |
0.592 |
4.41·10-4 |
mbar ls-1 |
0.1 |
1 |
0.75 |
0.987 |
750 |
59.2 |
5.92·10-2 |
4.41·10-5 |
Torr ls-1 |
0.133 |
1.33 |
1 |
1.32 |
1000 |
78.9 |
7.89·10-2 |
5.85·10-5 |
atm cm3 s-1 |
0.101 |
1.01 |
0.76 |
1 |
760 |
60 |
6·10-2 |
4.45·10-5 |
lusec |
1.33·10-4 |
1.33·10-3 |
10-3 |
1.32·10-3 |
1 |
7.89·10-2 |
7.89·10-5 |
5.86·10-8 |
sccm |
1.69·10-3 |
1.69·10-2 |
1.27·10-2 |
1.67·10-2 |
12.7 |
1 |
10-3 |
7.45·10-7 |
slm |
1.69 |
16.9 |
12.7 |
16.7 |
1.27·104 |
1000 |
1 |
7.45·10-4 |
Mol s-1 |
2.27·103 |
2.27·104 |
1.7·104 |
2.24·104 |
1.7·107 |
1.34·106 |
1.34·103 |
1 |