Gasflow calculation for Learn

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Gasflow calculation for Learn

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Pfeil2

Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application.

 

1.At first it is necessary to find out about the required control range respectively its conductance values. Each working point (pressure / flow) must be calculated with one following formulas. Choose the applicable formula depending on units you are familiar with.

 

Calculation

CWP        required conductance of working point [l/s]

qWP        gasflow of working point [Pa m3/s]

pWP        pressure of working point  [Pa]

 

Calculation2

CWP        required conductance of working point [l/s]

qWP        gasflow of working point [mbar l/s]

pWP        pressure of working point  [mbar]

 

Calculation3

CWP        required conductance of working point [l/s]

qWP        gasflow of working point [sccm]

pWP        pressure of working point  [Torr]

 

2.Out of these calculated conductance values choose the lowest.

Calculation4

CR        required lower conductance [l/s]

CWPx        required conductance of working points [l/s]

Pfeil3

To make sure that the valve is capable to control the most extreme working point verify that CR ≥ Cmin of the valve (refer to «Technical data»).

 

3.Calculate gasflow for learn. Choose the applicable formula depending on units you are familiar with.

Calculation5

qL        gasflow for learn [Pa m3/s]

pSFS        sensor full scale pressure [Pa]

Cmin        min. controllable conductance of valve [l/s], (refer to «Technical data»)

 

 

Calculation6

qL        gasflow for learn [mbar l/s]

pSFS        sensor full scale pressure [mbar]

Cmin        min. controllable conductance of valve [l/s], (refer to «Technical data»)

 

 

Calculation7

qL        gasflow for learn [sccm]

pSFS        sensor full scale pressure [Torr]

Cmin        min. controllable conductance of valve [l/s], (refer to «Technical data»)