Precision & Stability

The VAT vacuum valve portfolio for thin film coating processes is designed for precise, stable operation even under changing process conditions. Key features include precise gas flow control even at low conductance levels, minimized residual gas and particulate emissions, and a modular design that allows the required vacuum valves to be optimally configured to meet specific process requirements.

To learn more about how a VAT vacuum valve solution can solve challenges in thin film coating processes, please select from the products below.

Relevant Series