Vacuum valve solutions for electron microscopy, metrology, inspection & defect review are usually tailor-made. Based on selected VAT basic technologies, we develop the optimal solution for the specific application area in terms of technical parameters such as conductance, tightness, drive, degree of outgassing and particle freedom, temperature resistance as well as space requirements. 

To learn more about how a VAT vacuum valve solution can help with specific valve tasks in electron microscopy, metrology, inspection & defect review, please select a product below.

Relevant Series