A - Gate and Pendulum valves

are mostly used for turbo and cryo pump isolation. Besides the semiconductor industry, they are often used in FPD production systems, in the coating industry, in R&D, etc.

B - Control valves

in combination with a controller control the pressure in vacuum processes. The control valve is installed between the process chamber and the pump in order to control the pumping speed. This ensures fast and accurate process pressure control.

C - Transfer valves and doors for SEMI

are used for loadlock and process chamber isolation. The valves, or as a space-saving option only the inserts, are installed between chambers or integrated. Doors are used for isolation on the atmospheric pressure side. The sizes are in accordance with the SEMI standards, but customer specifed dimensions are possible.

D - Transfer valves and doors for FPD and PV

VAT Transfer valves and doors are used for load lock, transfer and process chamber isolation. The products are tailored to each application which allows adding of all needed attributes to enhance our customer system performance. The wide range of the VAT product portfolio allows a best fit to our customer applications and dimensions.

E - Angle or diaphragm valves

are shut-off devices for vacuum processes where an optically free passage is not required. The angle dimensions (mounting dimensions) are in conformity with the dimensions of commercial components (e. g. elbows, T-pieces, etc.). Exchangeability is therefore ensured.

F - Special valves for accelerators

and synchrotrons are sector shut-off devices in storage rings in order to minimize the RF loss and to increase the beam life. Safety devices such as fast closing valves/shutters are used to prevent air inrush. Beam stoppers protect experiments from beam load.

G - Special valves for gases and

heat insulation are usually standard valves modified for special requirements.

H - Flange connections

are used to install vacuum components such as pumps, valves or sensors.

I - Multi-valve modules Heaters Coatings

VAT offers complete customer specific modules with integrated valves and pumping lines to optimize throughput and footprint of customer systems.

Heaters help to minimize depositions and reduce pump down time.

Coatings mitigate corrosion effects from aggressive processes.

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