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VAT worldwide

VAT Vakuumventile AG
Seelistrasse 1
9469  Haag
Switzerland
Tel.:+ 41 81 771 61 61
Fax:+ 41 81 771 48 30

VAT Vacuum Valves (Shanghai) Co., Ltd.
848 Yunqiao Road
201206 Shanghai
China
Tel.:+86 21 5032 6658
Fax:+86 21 5032 6320

VAT Deutschland GmbH
Am Hochacker 4
85630  Grasbrunn
Germany
Tel.:+49 89 97897876 0
Fax:+49 89 97897876 11

VAT Vacuum Products Ltd.
Rugby Road
CV32 6EL Warwickshire
United Kingdom
Tel.:+44 19 2645 2753
Fax:+44 19 2645 2758

VAT S.A.R.L
Z.I. des Godets, C.E. 419
91374 Verrières-le-Buisson
France
Tel.:+33 1 69 20 69 11
Fax:+33 1 69 20 90 08

VAT Inc.
500 West-Cummings Park
MA 01801 Woburn
United States
Tel.:+1 781 935 1446
Fax:+1 800 935 1446

VAT Holand
Zuiderstraat 30
3434 BH Nieuwegein
Netherlands
Tel.:+31 306 018 251
Fax:+31 306 018 252

VAT Ltd.
2-6 Kinko-cho Kanagawa-ku
221-0056 Yokohama
Japan
Tel.:+81 454 400 341
Fax:+81 454 400 342

VAT Korea Ltd.
391 Chilgue-Dong
459-050 Gyeonggi-Do
Korea, South
Tel.:+82 31 662-6856
Fax:+82 31 662-6871

VAT Singapore Pte Ltd
2 Ang Mo Kio Street 64
569084 Singapore
Singapore
Tel.:+65 62525121
Fax:+65 62525127

VAT Taiwan Ltd.
Shui-Li Road
300  Hsin-Chu City
Taiwan
Tel.:+ 886 3 516 90 88
Fax:+ 886 3 516 90 99

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A - Gate and Pendulum valves

are mostly used for turbo and cryo pump isolation. Besides the semiconductor industry, they are often used in FPD production systems, in the coating industry, in R&D, etc.

B - Control valves

in combination with a controller control the pressure in vacuum processes. The control valve is installed between the process chamber and the pump in order to control the pumping speed. This ensures fast and accurate process pressure control.

C - Transfer valves and doors for SEMI

are used for loadlock and process chamber isolation. The valves, or as a space-saving option only the inserts, are installed between chambers or integrated. Doors are used for isolation on the atmospheric pressure side. The sizes are in accordance with the SEMI standards, but customer specifed dimensions are possible.

D - Transfer valves and doors for FPD and PV

VAT Transfer valves and doors are used for load lock, transfer and process chamber isolation. The products are tailored to each application which allows adding of all needed attributes to enhance our customer system performance. The wide range of the VAT product portfolio allows a best fit to our customer applications and dimensions.

E - Angle or diaphragm valves

are shut-off devices for vacuum processes where an optically free passage is not required. The angle dimensions (mounting dimensions) are in conformity with the dimensions of commercial components (e. g. elbows, T-pieces, etc.). Exchangeability is therefore ensured.

F - Special valves for accelerators...

... and synchrotrons are sector shut-off devices in storage rings in order to minimize the RF loss and to increase the beam life. Safety devices such as fast closing valves/shutters are used to prevent air inrush. Beam stoppers protect experiments from beam load.

G - Special valves for gases and...

...heat insulation are usually standard valves modified for special requirements.

H - Flange connections

are used to install vacuum components such as pumps, valves or sensors.

I - Special solutions

VAT offers heaters for deposition and pump down reduction, coatings to reduce corrosion from aggressive processes, integrated valves for direct installation of valve mechanisms into process chambers and retrofit Valves to replace exisiting valves/load locks.

 ©2012 VAT Vacuumvalves AG | Switzerland
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