Angle valves, diaphragm valves


211 - Dosing Valve

For introducing a controlled, reproducible flow of gas into a vacuum chamber.


212 - Pressure Relief Valve

System and operator protection for system overpressure.


213 - Venting Valve

For controlled venting or closing of vacuum systems.


220 - Diaphragm valve (DN 16 - 40)

For roughing / backing line isolation and rough metering of gases and liquids.


230 - Valve mechanism (lock)

For infrequently pumped vacuum vessels or gas isolation. Protects against unintentional opening. One valve mechanism (lock) for multiple pump-out ports.


244 - Vacuum angle valve (DN10 - 250)

For pumping and venting of vacuum systems with large gas flows. Resistance against high differential pressure. Long lifetime


245 - Vacuum inline valve (DN10 - 50; DN80)

For pumping and venting of vacuum systems with large gas flows. Resistance against differential pressure. Long lifetime


250 - HV angle valve

For pumping and venting of HV systems when maximum conductance is important.


251 - HV inline valve

For pumping and venting of HV systems when maximum conductance is important.


252 - HV 3/2 way valve

For pumping and venting of HV systems when maximum conductance is important.


264 - HV angle valve (DN10 - 250)

For pumping and venting of HV systems.


265 - HV inline valve

For pumping and venting of HV systems. Long lifetime


284 - UHV Angle valve (DN16, DN40, DN63)

For pumping and venting of UHV systems when an extremely low outgassing rate is important. Extremly low outgassing rate. Resistant against high differential pressure. Stationary rotatable CF flange.


290 - Angle valve with soft-pump (DN25 - 80)

For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important.


292 - Angle valve with soft-pump (DN100 - 160)

For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important. Resistance against differential pressure. Setting of the orifice opening by means of a scale.


541 - Easy close all-metal angle valve

For vacuum processes with extreme UHV requirements.


570 - All-metal angle valve

For vacuum processes with extreme UHV requirements and/or low/high temperature applications.


571 - All-metal angle valve

For vacuum processes with extreme UHV requirements and/or low/high temperature applications.


590 - Variable leak valve

Gas inlet valve for smallest gas flows to control the process pressure.


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