Series 032 | Transfer insert MONOVAT direct

For load lock / process module isolation. For 200mm, 300mm and 450mm semiconductor applications.

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Order nr. 03210-CE44


Factsheet

Inside diameter (ID) in mm (inch)46x236 (1,8"x9,3")
Flangeseat and actuator one unit
Body materialStainless steel
ActuatorPneumatic actuator with position indicator with solenoid valve double acting
SolenoidYes
Position indicatorYes
Pressure min. 1•10-9 mbar
Pressure max. 1.2 bar (abs)
FeedthroughBellows
Sealing technologyMONOVAT-System
Sealhead DescriptionFKM (VITON®)
Sealing materialsFKM (VITON®)
Molecular flow conductance ls-13340
Max. differential pressure closed position in bar1.2
Compressed air pressure max. in bar4
Compressed air pressure min. in bar2
Closing or opening time in sec.<1
Valve body temperature max. in °C200
Actuator temperature max. in °C150
Position Indicator temp. max. in °C80
Weight in kg / lbs20 / 44.09

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