Series 022 | Transfer valve MONOVAT direct

For load lock and process chamber isolation in semiconductor production systems for 200, 300 and 450 mm wafers. - Protected bellows - Long life time - locked pneumatically (option) - easy gate exchange

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Order nr. 02209-BA24


Factsheet

Inside diameter (ID) in mm (inch)32x222 (1.25"x8.75")
Flangeside A DN; side B larger than A
Body materialAluminum
ActuatorPneumatic actuator with position indicator without solenoid valve double acting
SolenoidNo
Position indicatorYes
Pressure min. 1•10-9 mbar
Pressure max. 1.2 bar (abs)
FeedthroughBellows
Sealing technologyMONOVAT-System
Sealhead DescriptionFKM (VITON®)
Sealing materialsFKM (VITON®)
Molecular flow conductance ls-11590
Max. differential pressure closed position in bar1.2
Compressed air pressure max. in bar6
Compressed air pressure min. in bar3
Volume of air cylinder in l0.09
Closing or opening time in sec.<1
Valve body temperature max. in °C150
Actuator temperature max. in °C150
Position Indicator temp. max. in °C80
Weight in kg / lbs8 / 17.64

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