Angle valves, diaphragm valves


211 - Dosing Valve

For introducing a controlled, reproducible flow of gas into a vacuum chamber.


212 - Pressure Relief Valve

System and operator protection for system overpressure.


213 - Venting Valve

For controlled venting or closing of vacuum systems.


220 - Diaphragm valve (DN 16 - 40)

For roughing / backing line isolation and rough metering of gases and liquids.


244 - Vacuum angle valve (DN10 - 250)

For pumping and venting of vacuum systems with large gas flows.


245 - Vacuum inline valve (DN10 - 50; DN80)

For pumping and venting of vacuum systems with large gas flows.


250 - HV angle valve

For pumping and venting of HV systems when maximum conductance is important.


251 - HV inline valve

For pumping and venting of HV systems when maximum conductance is important.


252 - HV 3/2 way valve

For pumping and venting of HV systems when maximum conductance is important.


264 - HV angle valve (DN10 - 250)

For pumping and venting of HV systems.


265 - HV inline valve

For pumping and venting of HV systems.


284 - UHV angle valve (DN16, DN40, DN63)

For pumping and venting of UHV systems when an extremely low outgassing rate is important.


290 - Angle valve with soft-pump (DN25 - 80)

For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important.


292 - Angle valve with soft-pump (DN100 - 160)

For pumping and venting of HV systems when few turbulences, particles, substrate movements and condensation are important.


541 - Easy close all-metal angle valve

For vacuum processes with extreme UHV requirements.


570 - All-metal angle valve

For vacuum processes with extreme UHV requirements and/or low/high temperature applications.


571 - All-metal angle valve

For vacuum processes with extreme UHV requirements and/or low/high temperature applications.


590 - Variable leak valve

Gas inlet valve for smallest gas flows to control the process pressure.


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