Series 075 | Large door L-VAT

Large door L-VAT

Transfer door for Flat Panel Display and Thin Film Photovoltaic production systems. The large L-VAT door is designed for use at atmospheric side of the in or out coming chamber (load lock) of a system.

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Factsheet

Series Number075
Series NameLarge door L-VAT
DescriptionThe key features of the large L-VAT door technology are the real L-motion of the gate, low particle and shock performance, modular design enables easy up scaling and compact design. By a wide range of options like heating protection shield on gate, stainless steal gate etc. (see table options) the product can be flexible adjusted to specific requirements.
Actuator typesPneumatic actuator (double acting)
Sealing technologyL-VAT
Sealing GateFKM (VITON®)
Sealing Bonnetnone
Leak rate Seat < 1 . 10-9 mbar ls-1
Body materialAluminum; Stainless steel
Cycles until first service ≥ 1 million cycles

Options

Actuator
  • Actuator cover kit to cover the pistons and cylinders of the gate pressure bar
Door
  • Other sealing materials, e.g. FFKM, VMQ, FVMO gate seal
  • O-ring seal in gate instead of the vulcanized seal (standard)
  • Gate hard anodized or nickel-plated

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