Series 068 | Rectangular valve FlapVAT

Rectangular valve FlapVAT

Transfer valve for large area coating systems e.g. architecture glass and photovoltaic panels/cells. The SolVAT transfer valve is used for load lock, transfer and process chamber isolation.

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Factsheet

Series Number068
Series NameRectangular valve FlapVAT
DescriptionThe FlapVAT transfer valve is offered for opening heights up to 100mm as a low-cost supplement to the SolVAT transfer valve. The applied valve technology is referred to as a flapper. Compared to other flapper valves the FlapVAT transfer valve has a long gate seal lifetime and is mechanically locked in the closed position. Optionally, it is also available in the version «differential pressure resistant in either direction».
Actuator typesPneumatic actuator (double acting)
Sealing technologyFlapVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughRotary feedthrough
Leak rate body < 1 . 10-7 mbar ls-1
Leak rate Seat < 1 . 10-5 mbar ls-1
Nominal inside diameters (ID) in mm (inch)special - special
Body materialAluminum; Stainless steel
Cycles until first service ≥ 1 million cycles

Options

Valve
  • Costumer specified flanges: Groove with O-ring
  • Watercooling in body to cool the flange seals
  • Vertical mounting orientation
  • Resistant against 1 bar differential in opening direction
  • Other sealing materials
Actuator
  • Rotary feedthrough with pump port
  • Actuator with distance piece for temperature reduction
Position indicator
  • NPN - type
Gate
  • Gate shield for heat radiation or coating from process protection
  • Watercooling at gate to cool the gate seal
Insert
  • Integrated valve (Insert type)

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