Series 066 | Transfer valve SolVAT

Transfer valve SolVAT

Transfer valve for thin film production systems of photovoltaic panels/cells. In the thin film PV production systems the SolVAT transfer valve is used for load lock, transfer and process chamber isolation.

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Factsheet

Series Number066
Series NameTransfer valve SolVAT
DescriptionThe key features of the SolVAT technology are the robust mechanism design which can withstand harsh environment, low cost of owner ship and modular design enables easy upscaling. By a wide range of options like water cooling on body and seat, full stainless steel valve etc. (see table options) the product can be flexible adjusted to specific requirements.
Actuator typesPneumatic actuator (double acting)
Sealing technologyL-VAT
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughShaft feedthrough
Leak rate body < 1 . 10-7 mbar ls-1
Leak rate Seat < 1 . 10-5 mbar ls-1
Nominal inside diameters (ID) in mm (inch)special - special
Body materialAluminum
Cycles until first service ≥ 1 million cycles

Options

Valve
  • Surface: Body and gate anodized
  • Various sealing materials
  • Vertical mounting orientation
  • Watercooling in body to cool the flange seals
Actuator
  • Bellows feedthrough
  • PTFE bellows feedthrough (protection bellows)
Position indicator
  • NPN - type
Gate
  • Gate shield for heat radiation or coating from process protection
  • Gate O-ring positioned on body
Insert
  • Integrated valve (Insert type)

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