Series 061 | Rectangular gate valve TwinVAT

Rectangular gate valve TwinVAT

Transfer valve for Generation 4 up to 11 Flat Panel Display production systems. In the FPD production systems the TwinVAT transfer valve is used for load lock, transfer, process chamber isolation.

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Factsheet

Series Number061
Series NameRectangular gate valve TwinVAT
DescriptionThe key features of the TwinVAT technology are the lightweight design, fast opening and closing movement, low particle generation, easy and fast maintenance, low cost of ownership and the modular design, which enables easy upscaling. Unique with this valve design is the special service position, under which one chamber is maintained under vacuum during gate service. By a wide range of options such as gate grounding, various sealing compound materials for gate etc. (see table options) the product can be flexible adjusted to specific requirements for various display manufacturing processes.
Actuator typesPneumatic: double acting with position indicator
Sealing technologyT-MOTION
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughShaft feedthrough
Leak rate body < 1 . 10-7 mbar ls-1
Leak rate Seat < 1 . 10-7 mbar ls-1
Nominal inside diameters (ID) in mm (inch)special - special
Body materialAluminum
Cycles until first service ≥ 1 million cycles

Options

Valve
  • Process control unit (PCU) and solenoid valves
  • Surface treatment, e.g. hard anodized aluminum
  • Vacuum gauge to detect the pressure inside the valve body
  • Vertical mounting position
Gate
  • Other sealing materials
  • Electrical grounding
Actuator
  • Bellows feedthrough
Insert
  • Integrated valve (insert type)

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