Series 061 | Rectangular gate valve TwinVAT

Rectangular gate valve TwinVAT

Transfer valve for Generation 4 up to 11 Flat Panel Display production systems. In the FPD production systems the TwinVAT transfer valve is used for load lock, transfer, process chamber isolation.

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Factsheet

Series Number061
Series NameRectangular gate valve TwinVAT
DescriptionThe key features of the TwinVAT technology are the lightweight design, fast opening and closing movement, low particle generation, easy and fast maintenance, low cost of ownership and the modular design enables easy upscaling. Unique with this valve design is the special service position while one chamber is maintained under vacuum during gate service. By a wide range of options like gate grounding, various sealing compound materials for gate etc. (see table options) the product can be flexible adjusted to specific requirements for.
Actuator typesPneumatic actuator (double acting), Pneumatic actuator (double acting)
Sealing technologyT-MOTION
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughShaft feedthrough
Leak rate body < 1 . 10-7 mbar ls-1
Leak rate Seat < 1 . 10-7 mbar ls-1
Nominal inside diameters (ID) in mm (inch)special - special
Body materialAluminum
Cycles until first service ≥ 1 million cycles

Options

Valve
  • Various sealing compounds
  • Surface: Body and gate hard anodized
  • Vertical mounting orientation
  • Vacuum gauge to detect the pressure inside the valve body
Actuator
  • Bellows feedthrough
Gate
  • Designed for 1.2 bar differential pressure on the gate in either direction
  • Electrical grounding
Insert
  • Integrated valve (insert type)

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