Series 060 | Transfer valve XL-VAT

Transfer valve XL-VAT

Transfer valve for Generation 4 up to G11 Flat Panel Display production systems. In the FPD production systems the XL-VAT transfer valve is used for load lock, transfer, process chamber isolation.

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Factsheet

Series Number060
Series NameTransfer valve XL-VAT
DescriptionThe key features of the XL-VAT technology are the fast and simple maintenance, low cost of ownership, adjustable sealing force on gate seal and modular design enables easy upscaling. By a wide range of options like gate grounding, various sealing compound materials for gate etc. (see table options) the product can be flexible adjusted to specific requirements.
Actuator typesPneumatic actuator (double acting), Pneumatic actuator (single acting)
Sealing technologyL-VAT
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughShaft feedthrough
Leak rate body < 1 . 10-7 mbar ls-1
Leak rate Seat < 1 . 10-7 mbar ls-1
Nominal inside diameters (ID) in mm (inch)special - special
Body materialAluminum
Cycles until first service ≥ 1 million cycles

Options

Valve
  • Various sealing compounds
  • Surface: Body and gate hard anodized
  • Vertical mounting orientation
Actuator
  • Bellows feedthrough
Gate
  • Designed for 1.2 bar differential pressure on the gate in either direction
  • Gate electrical grounding
Insert
  • Integrated valve (Insert type)

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