Series 027 | Rectangular gate valve R2R MONOVAT

Rectangular gate valve R2R MONOVAT

For web/foil coating systems.

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Factsheet

Series Number027
Series NameRectangular gate valve R2R MONOVAT
DescriptionThe Roll-to-Roll transfer valve MONOVAT enables tool owners to maintain vacuum isolation between the process and payout and take up chambers to allow for quick and easy exchange of sputter sources and foil/web coils. The MONOVAT Roll-to-Roll transfer valve with double seal MONOVAT technology allows the tool owner to maintain excellent leak rates in high vacuum applications while clamping metal or plastic web substrates without damage.
Actuator typesPneumatic actuator (double acting)
Sealing technologyMONOVAT-System
Sealing GateFKM (VITON®)
Sealing BonnetFKM (VITON®)
FeedthroughShaft feedthrough with intermediate pumping
Leak rate body < 1 . 10-5 mbar ls-1
Leak rate Seat < 1 . 10-5 mbar ls-1
Nominal inside diameters (ID) in mm (inch)special - special
Body materialAluminum
Cycles until first service 10000 cycles

Options

Valve
  • In vacuum solution - enables to place the entire valve (incl. actuators) in the vacuum chamber
  • Special opening sizes: On request
  • Costumer specified flanges: Groove with O-ring
  • Surface: aluminum hard anodized
  • Watercooling in body to cool the flange seals
Actuator
  • Solenoid for impulse actuation 24 V DC, 12 V DC, 115V 50/60 Hz, 230 V 50/60
  • Bellows feedthrough
Position indicator
  • NPN - tpye
Gate
  • Gate shield for heat radiation or coating from process protection
  • Watercooling at gate to cool the gate seal

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